2/23/2012	11:25:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/23/2012	11:25:08 AM	Recipe started at 11:25 AM
2/23/2012	11:25:08 AM	Helium valve closed
2/23/2012	11:25:08 AM	H2 valve closed
2/23/2012	11:25:08 AM	BCl3 valve closed
2/23/2012	11:25:08 AM	PH3 valve closed
2/23/2012	11:25:08 AM	SiCl4 pre valve closed
2/23/2012	11:25:08 AM	SiCl4 post valve closed
2/23/2012	11:25:08 AM	Main Vac valve closed
2/23/2012	11:25:08 AM	Bypass valve closed
2/23/2012	11:25:08 AM	Bubbler valve closed
2/23/2012	11:25:08 AM	Helium MFC set to  0.000000
2/23/2012	11:25:08 AM	H2 MFC set to  0.000000
2/23/2012	11:25:08 AM	BCl3 MFC set to  0.000000
2/23/2012	11:25:08 AM	PH3 MFC set to  0.000000
2/23/2012	11:25:08 AM	SiCl4 MFC set to  0.000000
2/23/2012	11:25:08 AM	Bypass solenoid MFC set to  0.000000
2/23/2012	11:25:08 AM	Tube furnace set to 0
2/23/2012	11:25:11 AM	H2 valve closed
2/23/2012	11:25:11 AM	BCl3 valve closed
2/23/2012	11:25:11 AM	PH3 valve closed
2/23/2012	11:25:11 AM	SiCl4 pre valve closed
2/23/2012	11:25:11 AM	SiCl4 post valve closed
2/23/2012	11:25:11 AM	Main Vac valve closed
2/23/2012	11:25:11 AM	Bypass valve closed
2/23/2012	11:25:11 AM	Bubbler valve closed
2/23/2012	11:25:11 AM	Helium valve opened
2/23/2012	11:25:11 AM	Helium MFC set to  500.000000
2/23/2012	11:25:11 AM	H2 MFC set to  0.000000
2/23/2012	11:25:11 AM	BCl3 MFC set to  0.000000
2/23/2012	11:25:11 AM	PH3 MFC set to  0.000000
2/23/2012	11:25:11 AM	SiCl4 MFC set to  0.000000
2/23/2012	11:25:11 AM	Bypass solenoid MFC set to  0.000000
2/23/2012	11:25:12 AM	Tube furnace set to 0
2/23/2012	11:26:16 AM	Helium valve closed
2/23/2012	11:26:16 AM	H2 valve closed
2/23/2012	11:26:16 AM	BCl3 valve closed
2/23/2012	11:26:16 AM	PH3 valve closed
2/23/2012	11:26:16 AM	SiCl4 pre valve closed
2/23/2012	11:26:16 AM	SiCl4 post valve closed
2/23/2012	11:26:16 AM	Main Vac valve closed
2/23/2012	11:26:16 AM	Bypass valve closed
2/23/2012	11:26:16 AM	Bubbler valve closed
2/23/2012	11:26:16 AM	Helium MFC set to  0.000000
2/23/2012	11:26:16 AM	H2 MFC set to  0.000000
2/23/2012	11:26:16 AM	BCl3 MFC set to  0.000000
2/23/2012	11:26:16 AM	PH3 MFC set to  0.000000
2/23/2012	11:26:16 AM	SiCl4 MFC set to  0.000000
2/23/2012	11:26:16 AM	Bypass solenoid MFC set to  0.000000
2/23/2012	11:26:16 AM	Tube furnace set to 0
2/23/2012	11:26:17 AM	Run finished at 11:26 AM
2/23/2012	11:26:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/23/2012	11:30:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/23/2012	11:30:04 AM	Recipe started at 11:30 AM
2/23/2012	11:30:04 AM	Helium valve closed
2/23/2012	11:30:04 AM	H2 valve closed
2/23/2012	11:30:04 AM	BCl3 valve closed
2/23/2012	11:30:04 AM	PH3 valve closed
2/23/2012	11:30:04 AM	SiCl4 pre valve closed
2/23/2012	11:30:04 AM	SiCl4 post valve closed
2/23/2012	11:30:04 AM	Main Vac valve closed
2/23/2012	11:30:04 AM	Bubbler valve closed
2/23/2012	11:30:04 AM	Bypass valve opened
2/23/2012	11:30:04 AM	Helium MFC set to  0.000000
2/23/2012	11:30:04 AM	H2 MFC set to  0.000000
2/23/2012	11:30:04 AM	BCl3 MFC set to  0.000000
2/23/2012	11:30:04 AM	PH3 MFC set to  0.000000
2/23/2012	11:30:04 AM	SiCl4 MFC set to  0.000000
2/23/2012	11:30:04 AM	Bypass solenoid MFC set to  0.000000
2/23/2012	11:30:04 AM	Tube furnace set to 0
2/23/2012	11:31:09 AM	Helium valve closed
2/23/2012	11:31:09 AM	H2 valve closed
2/23/2012	11:31:09 AM	BCl3 valve closed
2/23/2012	11:31:09 AM	PH3 valve closed
2/23/2012	11:31:09 AM	SiCl4 pre valve closed
2/23/2012	11:31:09 AM	SiCl4 post valve closed
2/23/2012	11:31:09 AM	Main Vac valve closed
2/23/2012	11:31:09 AM	Bubbler valve closed
2/23/2012	11:31:09 AM	Bypass valve opened
2/23/2012	11:31:09 AM	Helium MFC set to  0.000000
2/23/2012	11:31:09 AM	H2 MFC set to  0.000000
2/23/2012	11:31:09 AM	BCl3 MFC set to  0.000000
2/23/2012	11:31:09 AM	PH3 MFC set to  0.000000
2/23/2012	11:31:09 AM	SiCl4 MFC set to  0.000000
2/23/2012	11:31:09 AM	Bypass solenoid MFC set to  0.000000
2/23/2012	11:31:09 AM	Tube furnace set to 0
2/23/2012	11:32:09 AM	Helium valve closed
2/23/2012	11:32:09 AM	H2 valve closed
2/23/2012	11:32:09 AM	BCl3 valve closed
2/23/2012	11:32:09 AM	PH3 valve closed
2/23/2012	11:32:09 AM	SiCl4 pre valve closed
2/23/2012	11:32:09 AM	SiCl4 post valve closed
2/23/2012	11:32:09 AM	Bypass valve closed
2/23/2012	11:32:09 AM	Bubbler valve closed
2/23/2012	11:32:09 AM	Main Vac valve opened
2/23/2012	11:32:09 AM	Helium MFC set to  0.000000
2/23/2012	11:32:09 AM	H2 MFC set to  0.000000
2/23/2012	11:32:09 AM	BCl3 MFC set to  0.000000
2/23/2012	11:32:09 AM	PH3 MFC set to  0.000000
2/23/2012	11:32:09 AM	SiCl4 MFC set to  0.000000
2/23/2012	11:32:09 AM	Bypass solenoid MFC set to  0.000000
2/23/2012	11:32:09 AM	Tube furnace set to 0
2/23/2012	11:32:10 AM	Run finished at 11:32 AM
2/23/2012	11:32:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/23/2012	11:34:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/23/2012	11:34:33 AM	Recipe started at 11:34 AM
2/23/2012	11:34:33 AM	Helium valve closed
2/23/2012	11:34:33 AM	H2 valve closed
2/23/2012	11:34:33 AM	BCl3 valve closed
2/23/2012	11:34:33 AM	PH3 valve closed
2/23/2012	11:34:33 AM	SiCl4 pre valve closed
2/23/2012	11:34:33 AM	SiCl4 post valve closed
2/23/2012	11:34:33 AM	Main Vac valve closed
2/23/2012	11:34:33 AM	Bypass valve closed
2/23/2012	11:34:33 AM	Bubbler valve closed
2/23/2012	11:34:33 AM	Helium MFC set to  0.000000
2/23/2012	11:34:33 AM	H2 MFC set to  0.000000
2/23/2012	11:34:33 AM	BCl3 MFC set to  0.000000
2/23/2012	11:34:33 AM	PH3 MFC set to  0.000000
2/23/2012	11:34:33 AM	SiCl4 MFC set to  0.000000
2/23/2012	11:34:33 AM	Bypass solenoid MFC set to  0.000000
2/23/2012	11:34:33 AM	Tube furnace set to 0
2/23/2012	11:34:36 AM	H2 valve closed
2/23/2012	11:34:36 AM	BCl3 valve closed
2/23/2012	11:34:36 AM	PH3 valve closed
2/23/2012	11:34:36 AM	SiCl4 pre valve closed
2/23/2012	11:34:36 AM	SiCl4 post valve closed
2/23/2012	11:34:36 AM	Main Vac valve closed
2/23/2012	11:34:36 AM	Bypass valve closed
2/23/2012	11:34:36 AM	Bubbler valve closed
2/23/2012	11:34:36 AM	Helium valve opened
2/23/2012	11:34:36 AM	Helium MFC set to  500.000000
2/23/2012	11:34:36 AM	H2 MFC set to  0.000000
2/23/2012	11:34:36 AM	BCl3 MFC set to  0.000000
2/23/2012	11:34:36 AM	PH3 MFC set to  0.000000
2/23/2012	11:34:36 AM	SiCl4 MFC set to  0.000000
2/23/2012	11:34:36 AM	Bypass solenoid MFC set to  0.000000
2/23/2012	11:34:36 AM	Tube furnace set to 0
2/23/2012	11:35:38 AM	Helium valve closed
2/23/2012	11:35:38 AM	H2 valve closed
2/23/2012	11:35:38 AM	BCl3 valve closed
2/23/2012	11:35:38 AM	PH3 valve closed
2/23/2012	11:35:38 AM	SiCl4 pre valve closed
2/23/2012	11:35:38 AM	SiCl4 post valve closed
2/23/2012	11:35:38 AM	Main Vac valve closed
2/23/2012	11:35:38 AM	Bypass valve closed
2/23/2012	11:35:38 AM	Bubbler valve closed
2/23/2012	11:35:38 AM	Helium MFC set to  0.000000
2/23/2012	11:35:38 AM	H2 MFC set to  0.000000
2/23/2012	11:35:38 AM	BCl3 MFC set to  0.000000
2/23/2012	11:35:38 AM	PH3 MFC set to  0.000000
2/23/2012	11:35:38 AM	SiCl4 MFC set to  0.000000
2/23/2012	11:35:38 AM	Bypass solenoid MFC set to  0.000000
2/23/2012	11:35:38 AM	Tube furnace set to 0
2/23/2012	11:35:39 AM	Run finished at 11:35 AM
2/23/2012	11:35:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/23/2012	11:39:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/23/2012	11:39:34 AM	Recipe started at 11:39 AM
2/23/2012	11:39:35 AM	Helium valve closed
2/23/2012	11:39:35 AM	H2 valve closed
2/23/2012	11:39:35 AM	BCl3 valve closed
2/23/2012	11:39:35 AM	PH3 valve closed
2/23/2012	11:39:35 AM	SiCl4 pre valve closed
2/23/2012	11:39:35 AM	SiCl4 post valve closed
2/23/2012	11:39:35 AM	Main Vac valve closed
2/23/2012	11:39:35 AM	Bubbler valve closed
2/23/2012	11:39:35 AM	Bypass valve opened
2/23/2012	11:39:35 AM	Helium MFC set to  0.000000
2/23/2012	11:39:35 AM	H2 MFC set to  0.000000
2/23/2012	11:39:35 AM	BCl3 MFC set to  0.000000
2/23/2012	11:39:35 AM	PH3 MFC set to  0.000000
2/23/2012	11:39:35 AM	SiCl4 MFC set to  0.000000
2/23/2012	11:39:35 AM	Bypass solenoid MFC set to  0.000000
2/23/2012	11:39:35 AM	Tube furnace set to 0
2/23/2012	11:40:40 AM	Helium valve closed
2/23/2012	11:40:40 AM	H2 valve closed
2/23/2012	11:40:40 AM	BCl3 valve closed
2/23/2012	11:40:40 AM	PH3 valve closed
2/23/2012	11:40:40 AM	SiCl4 pre valve closed
2/23/2012	11:40:40 AM	SiCl4 post valve closed
2/23/2012	11:40:40 AM	Main Vac valve closed
2/23/2012	11:40:40 AM	Bubbler valve closed
2/23/2012	11:40:40 AM	Bypass valve opened
2/23/2012	11:40:40 AM	Helium MFC set to  0.000000
2/23/2012	11:40:40 AM	H2 MFC set to  0.000000
2/23/2012	11:40:40 AM	BCl3 MFC set to  0.000000
2/23/2012	11:40:40 AM	PH3 MFC set to  0.000000
2/23/2012	11:40:40 AM	SiCl4 MFC set to  0.000000
2/23/2012	11:40:40 AM	Bypass solenoid MFC set to  0.000000
2/23/2012	11:40:40 AM	Tube furnace set to 0
2/23/2012	11:41:40 AM	Helium valve closed
2/23/2012	11:41:40 AM	H2 valve closed
2/23/2012	11:41:40 AM	BCl3 valve closed
2/23/2012	11:41:40 AM	PH3 valve closed
2/23/2012	11:41:40 AM	SiCl4 pre valve closed
2/23/2012	11:41:40 AM	SiCl4 post valve closed
2/23/2012	11:41:40 AM	Bypass valve closed
2/23/2012	11:41:40 AM	Bubbler valve closed
2/23/2012	11:41:40 AM	Main Vac valve opened
2/23/2012	11:41:40 AM	Helium MFC set to  0.000000
2/23/2012	11:41:40 AM	H2 MFC set to  0.000000
2/23/2012	11:41:40 AM	BCl3 MFC set to  0.000000
2/23/2012	11:41:40 AM	PH3 MFC set to  0.000000
2/23/2012	11:41:40 AM	SiCl4 MFC set to  0.000000
2/23/2012	11:41:40 AM	Bypass solenoid MFC set to  0.000000
2/23/2012	11:41:40 AM	Tube furnace set to 0
2/23/2012	11:41:41 AM	Run finished at 11:41 AM
2/23/2012	11:41:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/23/2012	11:58:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/23/2012	11:58:19 AM	Recipe started at 11:58 AM
2/23/2012	11:58:19 AM	Helium valve closed
2/23/2012	11:58:19 AM	H2 valve closed
2/23/2012	11:58:19 AM	BCl3 valve closed
2/23/2012	11:58:19 AM	PH3 valve closed
2/23/2012	11:58:19 AM	SiCl4 pre valve closed
2/23/2012	11:58:19 AM	SiCl4 post valve closed
2/23/2012	11:58:19 AM	Main Vac valve closed
2/23/2012	11:58:19 AM	Bubbler valve closed
2/23/2012	11:58:19 AM	Bypass valve opened
2/23/2012	11:58:19 AM	Helium MFC set to  0.000000
2/23/2012	11:58:19 AM	H2 MFC set to  0.000000
2/23/2012	11:58:19 AM	BCl3 MFC set to  0.000000
2/23/2012	11:58:19 AM	PH3 MFC set to  0.000000
2/23/2012	11:58:19 AM	SiCl4 MFC set to  0.000000
2/23/2012	11:58:19 AM	Bypass solenoid MFC set to  0.000000
2/23/2012	11:58:19 AM	Tube furnace set to 0
2/23/2012	11:58:20 AM	Helium valve closed
2/23/2012	11:58:20 AM	H2 valve closed
2/23/2012	11:58:20 AM	BCl3 valve closed
2/23/2012	11:58:20 AM	PH3 valve closed
2/23/2012	11:58:20 AM	SiCl4 pre valve closed
2/23/2012	11:58:20 AM	SiCl4 post valve closed
2/23/2012	11:58:20 AM	Main Vac valve closed
2/23/2012	11:58:20 AM	Bubbler valve closed
2/23/2012	11:58:20 AM	Bypass valve opened
2/23/2012	11:58:20 AM	Helium MFC set to  0.000000
2/23/2012	11:58:20 AM	H2 MFC set to  0.000000
2/23/2012	11:58:20 AM	BCl3 MFC set to  0.000000
2/23/2012	11:58:20 AM	PH3 MFC set to  0.000000
2/23/2012	11:58:20 AM	SiCl4 MFC set to  0.000000
2/23/2012	11:58:20 AM	Bypass solenoid MFC set to  0.000000
2/23/2012	11:58:20 AM	Tube furnace set to 0
2/23/2012	11:58:22 AM	Helium valve closed
2/23/2012	11:58:22 AM	H2 valve closed
2/23/2012	11:58:22 AM	BCl3 valve closed
2/23/2012	11:58:22 AM	PH3 valve closed
2/23/2012	11:58:22 AM	SiCl4 pre valve closed
2/23/2012	11:58:22 AM	SiCl4 post valve closed
2/23/2012	11:58:22 AM	Bypass valve closed
2/23/2012	11:58:22 AM	Bubbler valve closed
2/23/2012	11:58:22 AM	Main Vac valve opened
2/23/2012	11:58:22 AM	Helium MFC set to  0.000000
2/23/2012	11:58:22 AM	H2 MFC set to  0.000000
2/23/2012	11:58:22 AM	BCl3 MFC set to  0.000000
2/23/2012	11:58:22 AM	PH3 MFC set to  0.000000
2/23/2012	11:58:22 AM	SiCl4 MFC set to  0.000000
2/23/2012	11:58:22 AM	Bypass solenoid MFC set to  0.000000
2/23/2012	11:58:22 AM	Tube furnace set to 0
2/23/2012	11:58:46 AM	Run aborted at 11:58 AM
2/23/2012	11:58:46 AM	Helium valve closed
2/23/2012	11:58:46 AM	H2 valve closed
2/23/2012	11:58:46 AM	BCl3 valve closed
2/23/2012	11:58:46 AM	PH3 valve closed
2/23/2012	11:58:46 AM	SiCl4 pre valve closed
2/23/2012	11:58:46 AM	SiCl4 post valve closed
2/23/2012	11:58:46 AM	Bypass valve closed
2/23/2012	11:58:46 AM	Main Vac valve closed
2/23/2012	11:58:46 AM	Bubbler valve closed
2/23/2012	11:58:46 AM	Helium MFC set to  0.000000
2/23/2012	11:58:46 AM	H2 MFC set to  0.000000
2/23/2012	11:58:46 AM	BCl3 MFC set to  0.000000
2/23/2012	11:58:46 AM	PH3 MFC set to  0.000000
2/23/2012	11:58:46 AM	SiCl4 MFC set to  0.000000
2/23/2012	11:58:46 AM	Tube furnace set to 0
2/23/2012	11:58:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/23/2012	11:58:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/23/2012	11:58:50 AM	Recipe started at 11:58 AM
2/23/2012	11:58:50 AM	Helium valve closed
2/23/2012	11:58:50 AM	H2 valve closed
2/23/2012	11:58:50 AM	BCl3 valve closed
2/23/2012	11:58:50 AM	PH3 valve closed
2/23/2012	11:58:50 AM	SiCl4 pre valve closed
2/23/2012	11:58:50 AM	SiCl4 post valve closed
2/23/2012	11:58:50 AM	Main Vac valve closed
2/23/2012	11:58:50 AM	Bubbler valve closed
2/23/2012	11:58:50 AM	Bypass valve opened
2/23/2012	11:58:50 AM	Helium MFC set to  0.000000
2/23/2012	11:58:50 AM	H2 MFC set to  0.000000
2/23/2012	11:58:50 AM	BCl3 MFC set to  0.000000
2/23/2012	11:58:50 AM	PH3 MFC set to  0.000000
2/23/2012	11:58:50 AM	SiCl4 MFC set to  0.000000
2/23/2012	11:58:50 AM	Bypass solenoid MFC set to  0.000000
2/23/2012	11:58:50 AM	Tube furnace set to 0
2/23/2012	11:58:51 AM	Helium valve closed
2/23/2012	11:58:51 AM	H2 valve closed
2/23/2012	11:58:51 AM	BCl3 valve closed
2/23/2012	11:58:51 AM	PH3 valve closed
2/23/2012	11:58:51 AM	SiCl4 pre valve closed
2/23/2012	11:58:51 AM	SiCl4 post valve closed
2/23/2012	11:58:51 AM	Main Vac valve closed
2/23/2012	11:58:51 AM	Bubbler valve closed
2/23/2012	11:58:51 AM	Bypass valve opened
2/23/2012	11:58:51 AM	Helium MFC set to  0.000000
2/23/2012	11:58:51 AM	H2 MFC set to  0.000000
2/23/2012	11:58:51 AM	BCl3 MFC set to  0.000000
2/23/2012	11:58:51 AM	PH3 MFC set to  0.000000
2/23/2012	11:58:51 AM	SiCl4 MFC set to  0.000000
2/23/2012	11:58:51 AM	Bypass solenoid MFC set to  0.000000
2/23/2012	11:58:51 AM	Tube furnace set to 0
2/23/2012	11:58:54 AM	Helium valve closed
2/23/2012	11:58:54 AM	H2 valve closed
2/23/2012	11:58:54 AM	BCl3 valve closed
2/23/2012	11:58:54 AM	PH3 valve closed
2/23/2012	11:58:54 AM	SiCl4 pre valve closed
2/23/2012	11:58:54 AM	SiCl4 post valve closed
2/23/2012	11:58:54 AM	Bypass valve closed
2/23/2012	11:58:54 AM	Bubbler valve closed
2/23/2012	11:58:54 AM	Main Vac valve opened
2/23/2012	11:58:54 AM	Helium MFC set to  0.000000
2/23/2012	11:58:54 AM	H2 MFC set to  0.000000
2/23/2012	11:58:54 AM	BCl3 MFC set to  0.000000
2/23/2012	11:58:54 AM	PH3 MFC set to  0.000000
2/23/2012	11:58:54 AM	SiCl4 MFC set to  0.000000
2/23/2012	11:58:54 AM	Bypass solenoid MFC set to  0.000000
2/23/2012	11:58:54 AM	Tube furnace set to 0
2/23/2012	11:58:55 AM	Run finished at 11:58 AM
2/23/2012	11:58:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/23/2012	12:53:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/23/2012	12:54:04 PM	Recipe started at 12:53 PM
2/23/2012	12:54:04 PM	Helium valve closed
2/23/2012	12:54:04 PM	H2 valve closed
2/23/2012	12:54:04 PM	BCl3 valve closed
2/23/2012	12:54:04 PM	PH3 valve closed
2/23/2012	12:54:04 PM	SiCl4 pre valve closed
2/23/2012	12:54:04 PM	SiCl4 post valve closed
2/23/2012	12:54:04 PM	Main Vac valve closed
2/23/2012	12:54:04 PM	Bubbler valve closed
2/23/2012	12:54:04 PM	Bypass valve opened
2/23/2012	12:54:04 PM	Helium MFC set to  0.000000
2/23/2012	12:54:04 PM	H2 MFC set to  0.000000
2/23/2012	12:54:04 PM	BCl3 MFC set to  0.000000
2/23/2012	12:54:04 PM	PH3 MFC set to  0.000000
2/23/2012	12:54:04 PM	SiCl4 MFC set to  0.000000
2/23/2012	12:54:04 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	12:54:04 PM	Tube furnace set to 0
2/23/2012	12:54:05 PM	Helium valve closed
2/23/2012	12:54:05 PM	H2 valve closed
2/23/2012	12:54:05 PM	BCl3 valve closed
2/23/2012	12:54:05 PM	PH3 valve closed
2/23/2012	12:54:05 PM	SiCl4 pre valve closed
2/23/2012	12:54:05 PM	SiCl4 post valve closed
2/23/2012	12:54:05 PM	Main Vac valve closed
2/23/2012	12:54:05 PM	Bubbler valve closed
2/23/2012	12:54:05 PM	Bypass valve opened
2/23/2012	12:54:05 PM	Helium MFC set to  0.000000
2/23/2012	12:54:05 PM	H2 MFC set to  0.000000
2/23/2012	12:54:05 PM	BCl3 MFC set to  0.000000
2/23/2012	12:54:05 PM	PH3 MFC set to  0.000000
2/23/2012	12:54:05 PM	SiCl4 MFC set to  0.000000
2/23/2012	12:54:05 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	12:54:05 PM	Tube furnace set to 0
2/23/2012	12:54:09 PM	Helium valve closed
2/23/2012	12:54:09 PM	H2 valve closed
2/23/2012	12:54:09 PM	BCl3 valve closed
2/23/2012	12:54:09 PM	PH3 valve closed
2/23/2012	12:54:09 PM	SiCl4 pre valve closed
2/23/2012	12:54:09 PM	SiCl4 post valve closed
2/23/2012	12:54:09 PM	Bypass valve closed
2/23/2012	12:54:09 PM	Bubbler valve closed
2/23/2012	12:54:09 PM	Main Vac valve opened
2/23/2012	12:54:09 PM	Helium MFC set to  0.000000
2/23/2012	12:54:09 PM	H2 MFC set to  0.000000
2/23/2012	12:54:09 PM	BCl3 MFC set to  0.000000
2/23/2012	12:54:09 PM	PH3 MFC set to  0.000000
2/23/2012	12:54:09 PM	SiCl4 MFC set to  0.000000
2/23/2012	12:54:09 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	12:54:09 PM	Tube furnace set to 0
2/23/2012	12:54:11 PM	H2 valve closed
2/23/2012	12:54:11 PM	BCl3 valve closed
2/23/2012	12:54:11 PM	PH3 valve closed
2/23/2012	12:54:11 PM	SiCl4 pre valve closed
2/23/2012	12:54:11 PM	SiCl4 post valve closed
2/23/2012	12:54:11 PM	Bypass valve closed
2/23/2012	12:54:11 PM	Bubbler valve closed
2/23/2012	12:54:11 PM	Helium valve opened
2/23/2012	12:54:11 PM	Main Vac valve opened
2/23/2012	12:54:11 PM	Helium MFC set to  20.000000
2/23/2012	12:54:11 PM	H2 MFC set to  0.000000
2/23/2012	12:54:11 PM	BCl3 MFC set to  0.000000
2/23/2012	12:54:11 PM	PH3 MFC set to  0.000000
2/23/2012	12:54:11 PM	SiCl4 MFC set to  0.000000
2/23/2012	12:54:11 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	12:54:11 PM	Tube furnace set to 0
2/23/2012	12:54:41 PM	Helium valve closed
2/23/2012	12:54:41 PM	H2 valve closed
2/23/2012	12:54:41 PM	BCl3 valve closed
2/23/2012	12:54:41 PM	PH3 valve closed
2/23/2012	12:54:41 PM	SiCl4 pre valve closed
2/23/2012	12:54:41 PM	SiCl4 post valve closed
2/23/2012	12:54:41 PM	Bypass valve closed
2/23/2012	12:54:41 PM	Bubbler valve closed
2/23/2012	12:54:41 PM	Main Vac valve opened
2/23/2012	12:54:41 PM	Helium MFC set to  0.000000
2/23/2012	12:54:41 PM	H2 MFC set to  0.000000
2/23/2012	12:54:41 PM	BCl3 MFC set to  0.000000
2/23/2012	12:54:41 PM	PH3 MFC set to  0.000000
2/23/2012	12:54:41 PM	SiCl4 MFC set to  0.000000
2/23/2012	12:54:41 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	12:54:41 PM	Tube furnace set to 0
2/23/2012	12:55:11 PM	H2 valve closed
2/23/2012	12:55:11 PM	BCl3 valve closed
2/23/2012	12:55:11 PM	PH3 valve closed
2/23/2012	12:55:11 PM	SiCl4 pre valve closed
2/23/2012	12:55:11 PM	SiCl4 post valve closed
2/23/2012	12:55:11 PM	Bypass valve closed
2/23/2012	12:55:11 PM	Bubbler valve closed
2/23/2012	12:55:11 PM	Helium valve opened
2/23/2012	12:55:11 PM	Main Vac valve opened
2/23/2012	12:55:11 PM	Helium MFC set to  20.000000
2/23/2012	12:55:11 PM	H2 MFC set to  0.000000
2/23/2012	12:55:11 PM	BCl3 MFC set to  0.000000
2/23/2012	12:55:11 PM	PH3 MFC set to  0.000000
2/23/2012	12:55:11 PM	SiCl4 MFC set to  0.000000
2/23/2012	12:55:11 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	12:55:11 PM	Tube furnace set to 0
2/23/2012	12:55:41 PM	Helium valve closed
2/23/2012	12:55:41 PM	H2 valve closed
2/23/2012	12:55:41 PM	BCl3 valve closed
2/23/2012	12:55:41 PM	PH3 valve closed
2/23/2012	12:55:41 PM	SiCl4 pre valve closed
2/23/2012	12:55:41 PM	SiCl4 post valve closed
2/23/2012	12:55:41 PM	Bypass valve closed
2/23/2012	12:55:41 PM	Bubbler valve closed
2/23/2012	12:55:41 PM	Main Vac valve opened
2/23/2012	12:55:41 PM	Helium MFC set to  0.000000
2/23/2012	12:55:41 PM	H2 MFC set to  0.000000
2/23/2012	12:55:41 PM	BCl3 MFC set to  0.000000
2/23/2012	12:55:41 PM	PH3 MFC set to  0.000000
2/23/2012	12:55:41 PM	SiCl4 MFC set to  0.000000
2/23/2012	12:55:41 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	12:55:42 PM	Tube furnace set to 0
2/23/2012	12:56:12 PM	H2 valve closed
2/23/2012	12:56:12 PM	BCl3 valve closed
2/23/2012	12:56:12 PM	PH3 valve closed
2/23/2012	12:56:12 PM	SiCl4 pre valve closed
2/23/2012	12:56:12 PM	SiCl4 post valve closed
2/23/2012	12:56:12 PM	Bypass valve closed
2/23/2012	12:56:12 PM	Bubbler valve closed
2/23/2012	12:56:12 PM	Helium valve opened
2/23/2012	12:56:12 PM	Main Vac valve opened
2/23/2012	12:56:12 PM	Helium MFC set to  20.000000
2/23/2012	12:56:12 PM	H2 MFC set to  0.000000
2/23/2012	12:56:12 PM	BCl3 MFC set to  0.000000
2/23/2012	12:56:12 PM	PH3 MFC set to  0.000000
2/23/2012	12:56:12 PM	SiCl4 MFC set to  0.000000
2/23/2012	12:56:12 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	12:56:12 PM	Tube furnace set to 0
2/23/2012	12:56:42 PM	Helium valve closed
2/23/2012	12:56:42 PM	H2 valve closed
2/23/2012	12:56:42 PM	BCl3 valve closed
2/23/2012	12:56:42 PM	PH3 valve closed
2/23/2012	12:56:42 PM	SiCl4 pre valve closed
2/23/2012	12:56:42 PM	SiCl4 post valve closed
2/23/2012	12:56:42 PM	Bypass valve closed
2/23/2012	12:56:42 PM	Bubbler valve closed
2/23/2012	12:56:42 PM	Main Vac valve opened
2/23/2012	12:56:42 PM	Helium MFC set to  0.000000
2/23/2012	12:56:42 PM	H2 MFC set to  0.000000
2/23/2012	12:56:42 PM	BCl3 MFC set to  0.000000
2/23/2012	12:56:42 PM	PH3 MFC set to  0.000000
2/23/2012	12:56:42 PM	SiCl4 MFC set to  0.000000
2/23/2012	12:56:42 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	12:56:42 PM	Tube furnace set to 0
2/23/2012	12:57:12 PM	H2 valve closed
2/23/2012	12:57:12 PM	BCl3 valve closed
2/23/2012	12:57:12 PM	PH3 valve closed
2/23/2012	12:57:12 PM	SiCl4 pre valve closed
2/23/2012	12:57:12 PM	SiCl4 post valve closed
2/23/2012	12:57:12 PM	Bypass valve closed
2/23/2012	12:57:12 PM	Bubbler valve closed
2/23/2012	12:57:12 PM	Helium valve opened
2/23/2012	12:57:12 PM	Main Vac valve opened
2/23/2012	12:57:12 PM	Helium MFC set to  20.000000
2/23/2012	12:57:12 PM	H2 MFC set to  0.000000
2/23/2012	12:57:12 PM	BCl3 MFC set to  0.000000
2/23/2012	12:57:12 PM	PH3 MFC set to  0.000000
2/23/2012	12:57:12 PM	SiCl4 MFC set to  0.000000
2/23/2012	12:57:12 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	12:57:12 PM	Tube furnace set to 0
2/23/2012	12:57:42 PM	Helium valve closed
2/23/2012	12:57:42 PM	H2 valve closed
2/23/2012	12:57:42 PM	BCl3 valve closed
2/23/2012	12:57:42 PM	PH3 valve closed
2/23/2012	12:57:42 PM	SiCl4 pre valve closed
2/23/2012	12:57:42 PM	SiCl4 post valve closed
2/23/2012	12:57:42 PM	Bypass valve closed
2/23/2012	12:57:42 PM	Bubbler valve closed
2/23/2012	12:57:42 PM	Main Vac valve opened
2/23/2012	12:57:42 PM	Helium MFC set to  0.000000
2/23/2012	12:57:42 PM	H2 MFC set to  0.000000
2/23/2012	12:57:42 PM	BCl3 MFC set to  0.000000
2/23/2012	12:57:42 PM	PH3 MFC set to  0.000000
2/23/2012	12:57:42 PM	SiCl4 MFC set to  0.000000
2/23/2012	12:57:42 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	12:57:42 PM	Tube furnace set to 0
2/23/2012	12:58:12 PM	H2 valve closed
2/23/2012	12:58:12 PM	BCl3 valve closed
2/23/2012	12:58:12 PM	PH3 valve closed
2/23/2012	12:58:12 PM	SiCl4 pre valve closed
2/23/2012	12:58:12 PM	SiCl4 post valve closed
2/23/2012	12:58:12 PM	Bypass valve closed
2/23/2012	12:58:12 PM	Bubbler valve closed
2/23/2012	12:58:12 PM	Helium valve opened
2/23/2012	12:58:12 PM	Main Vac valve opened
2/23/2012	12:58:12 PM	Helium MFC set to  20.000000
2/23/2012	12:58:12 PM	H2 MFC set to  0.000000
2/23/2012	12:58:12 PM	BCl3 MFC set to  0.000000
2/23/2012	12:58:12 PM	PH3 MFC set to  0.000000
2/23/2012	12:58:12 PM	SiCl4 MFC set to  0.000000
2/23/2012	12:58:12 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	12:58:13 PM	Tube furnace set to 0
2/23/2012	12:58:43 PM	Helium valve closed
2/23/2012	12:58:43 PM	H2 valve closed
2/23/2012	12:58:43 PM	BCl3 valve closed
2/23/2012	12:58:43 PM	PH3 valve closed
2/23/2012	12:58:43 PM	SiCl4 pre valve closed
2/23/2012	12:58:43 PM	SiCl4 post valve closed
2/23/2012	12:58:43 PM	Bypass valve closed
2/23/2012	12:58:43 PM	Bubbler valve closed
2/23/2012	12:58:43 PM	Main Vac valve opened
2/23/2012	12:58:43 PM	Helium MFC set to  0.000000
2/23/2012	12:58:43 PM	H2 MFC set to  0.000000
2/23/2012	12:58:43 PM	BCl3 MFC set to  0.000000
2/23/2012	12:58:43 PM	PH3 MFC set to  0.000000
2/23/2012	12:58:43 PM	SiCl4 MFC set to  0.000000
2/23/2012	12:58:43 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	12:58:43 PM	Tube furnace set to 0
2/23/2012	12:59:13 PM	H2 valve closed
2/23/2012	12:59:13 PM	BCl3 valve closed
2/23/2012	12:59:13 PM	PH3 valve closed
2/23/2012	12:59:13 PM	SiCl4 pre valve closed
2/23/2012	12:59:13 PM	SiCl4 post valve closed
2/23/2012	12:59:13 PM	Bypass valve closed
2/23/2012	12:59:13 PM	Bubbler valve closed
2/23/2012	12:59:13 PM	Helium valve opened
2/23/2012	12:59:13 PM	Main Vac valve opened
2/23/2012	12:59:13 PM	Helium MFC set to  20.000000
2/23/2012	12:59:13 PM	H2 MFC set to  0.000000
2/23/2012	12:59:13 PM	BCl3 MFC set to  0.000000
2/23/2012	12:59:13 PM	PH3 MFC set to  0.000000
2/23/2012	12:59:13 PM	SiCl4 MFC set to  0.000000
2/23/2012	12:59:13 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	12:59:13 PM	Tube furnace set to 0
2/23/2012	12:59:43 PM	Helium valve closed
2/23/2012	12:59:43 PM	H2 valve closed
2/23/2012	12:59:43 PM	BCl3 valve closed
2/23/2012	12:59:43 PM	PH3 valve closed
2/23/2012	12:59:43 PM	SiCl4 pre valve closed
2/23/2012	12:59:43 PM	SiCl4 post valve closed
2/23/2012	12:59:43 PM	Bypass valve closed
2/23/2012	12:59:43 PM	Bubbler valve closed
2/23/2012	12:59:43 PM	Main Vac valve opened
2/23/2012	12:59:43 PM	Helium MFC set to  0.000000
2/23/2012	12:59:43 PM	H2 MFC set to  0.000000
2/23/2012	12:59:43 PM	BCl3 MFC set to  0.000000
2/23/2012	12:59:43 PM	PH3 MFC set to  0.000000
2/23/2012	12:59:43 PM	SiCl4 MFC set to  0.000000
2/23/2012	12:59:43 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	12:59:43 PM	Tube furnace set to 0
2/23/2012	1:00:13 PM	H2 valve closed
2/23/2012	1:00:13 PM	BCl3 valve closed
2/23/2012	1:00:13 PM	PH3 valve closed
2/23/2012	1:00:13 PM	SiCl4 pre valve closed
2/23/2012	1:00:13 PM	SiCl4 post valve closed
2/23/2012	1:00:13 PM	Bypass valve closed
2/23/2012	1:00:13 PM	Bubbler valve closed
2/23/2012	1:00:13 PM	Helium valve opened
2/23/2012	1:00:13 PM	Main Vac valve opened
2/23/2012	1:00:13 PM	Helium MFC set to  20.000000
2/23/2012	1:00:13 PM	H2 MFC set to  0.000000
2/23/2012	1:00:13 PM	BCl3 MFC set to  0.000000
2/23/2012	1:00:13 PM	PH3 MFC set to  0.000000
2/23/2012	1:00:13 PM	SiCl4 MFC set to  0.000000
2/23/2012	1:00:13 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	1:00:13 PM	Tube furnace set to 0
2/23/2012	1:00:43 PM	Helium valve closed
2/23/2012	1:00:43 PM	H2 valve closed
2/23/2012	1:00:43 PM	BCl3 valve closed
2/23/2012	1:00:43 PM	PH3 valve closed
2/23/2012	1:00:43 PM	SiCl4 pre valve closed
2/23/2012	1:00:43 PM	SiCl4 post valve closed
2/23/2012	1:00:43 PM	Bypass valve closed
2/23/2012	1:00:43 PM	Bubbler valve closed
2/23/2012	1:00:43 PM	Main Vac valve opened
2/23/2012	1:00:43 PM	Helium MFC set to  0.000000
2/23/2012	1:00:43 PM	H2 MFC set to  0.000000
2/23/2012	1:00:43 PM	BCl3 MFC set to  0.000000
2/23/2012	1:00:43 PM	PH3 MFC set to  0.000000
2/23/2012	1:00:43 PM	SiCl4 MFC set to  0.000000
2/23/2012	1:00:43 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	1:00:44 PM	Tube furnace set to 0
2/23/2012	1:01:14 PM	H2 valve closed
2/23/2012	1:01:14 PM	BCl3 valve closed
2/23/2012	1:01:14 PM	PH3 valve closed
2/23/2012	1:01:14 PM	SiCl4 pre valve closed
2/23/2012	1:01:14 PM	SiCl4 post valve closed
2/23/2012	1:01:14 PM	Bypass valve closed
2/23/2012	1:01:14 PM	Bubbler valve closed
2/23/2012	1:01:14 PM	Helium valve opened
2/23/2012	1:01:14 PM	Main Vac valve opened
2/23/2012	1:01:14 PM	Helium MFC set to  20.000000
2/23/2012	1:01:14 PM	H2 MFC set to  0.000000
2/23/2012	1:01:14 PM	BCl3 MFC set to  0.000000
2/23/2012	1:01:14 PM	PH3 MFC set to  0.000000
2/23/2012	1:01:14 PM	SiCl4 MFC set to  0.000000
2/23/2012	1:01:14 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	1:01:14 PM	Tube furnace set to 0
2/23/2012	1:01:44 PM	Helium valve closed
2/23/2012	1:01:44 PM	H2 valve closed
2/23/2012	1:01:44 PM	BCl3 valve closed
2/23/2012	1:01:44 PM	PH3 valve closed
2/23/2012	1:01:44 PM	SiCl4 pre valve closed
2/23/2012	1:01:44 PM	SiCl4 post valve closed
2/23/2012	1:01:44 PM	Bypass valve closed
2/23/2012	1:01:44 PM	Bubbler valve closed
2/23/2012	1:01:44 PM	Main Vac valve opened
2/23/2012	1:01:44 PM	Helium MFC set to  0.000000
2/23/2012	1:01:44 PM	H2 MFC set to  0.000000
2/23/2012	1:01:44 PM	BCl3 MFC set to  0.000000
2/23/2012	1:01:44 PM	PH3 MFC set to  0.000000
2/23/2012	1:01:44 PM	SiCl4 MFC set to  0.000000
2/23/2012	1:01:44 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	1:01:44 PM	Tube furnace set to 0
2/23/2012	1:02:14 PM	H2 valve closed
2/23/2012	1:02:14 PM	BCl3 valve closed
2/23/2012	1:02:14 PM	PH3 valve closed
2/23/2012	1:02:14 PM	SiCl4 pre valve closed
2/23/2012	1:02:14 PM	SiCl4 post valve closed
2/23/2012	1:02:14 PM	Bypass valve closed
2/23/2012	1:02:14 PM	Bubbler valve closed
2/23/2012	1:02:14 PM	Helium valve opened
2/23/2012	1:02:14 PM	Main Vac valve opened
2/23/2012	1:02:14 PM	Helium MFC set to  20.000000
2/23/2012	1:02:14 PM	H2 MFC set to  0.000000
2/23/2012	1:02:14 PM	BCl3 MFC set to  0.000000
2/23/2012	1:02:14 PM	PH3 MFC set to  0.000000
2/23/2012	1:02:14 PM	SiCl4 MFC set to  0.000000
2/23/2012	1:02:14 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	1:02:14 PM	Tube furnace set to 0
2/23/2012	1:02:44 PM	Helium valve closed
2/23/2012	1:02:44 PM	H2 valve closed
2/23/2012	1:02:44 PM	BCl3 valve closed
2/23/2012	1:02:44 PM	PH3 valve closed
2/23/2012	1:02:44 PM	SiCl4 pre valve closed
2/23/2012	1:02:44 PM	SiCl4 post valve closed
2/23/2012	1:02:44 PM	Bypass valve closed
2/23/2012	1:02:44 PM	Bubbler valve closed
2/23/2012	1:02:44 PM	Main Vac valve opened
2/23/2012	1:02:44 PM	Helium MFC set to  0.000000
2/23/2012	1:02:44 PM	H2 MFC set to  0.000000
2/23/2012	1:02:44 PM	BCl3 MFC set to  0.000000
2/23/2012	1:02:44 PM	PH3 MFC set to  0.000000
2/23/2012	1:02:44 PM	SiCl4 MFC set to  0.000000
2/23/2012	1:02:44 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	1:02:44 PM	Tube furnace set to 0
2/23/2012	1:03:14 PM	H2 valve closed
2/23/2012	1:03:14 PM	BCl3 valve closed
2/23/2012	1:03:14 PM	PH3 valve closed
2/23/2012	1:03:14 PM	SiCl4 pre valve closed
2/23/2012	1:03:14 PM	SiCl4 post valve closed
2/23/2012	1:03:14 PM	Bypass valve closed
2/23/2012	1:03:14 PM	Bubbler valve closed
2/23/2012	1:03:14 PM	Helium valve opened
2/23/2012	1:03:14 PM	Main Vac valve opened
2/23/2012	1:03:14 PM	Helium MFC set to  20.000000
2/23/2012	1:03:14 PM	H2 MFC set to  0.000000
2/23/2012	1:03:14 PM	BCl3 MFC set to  0.000000
2/23/2012	1:03:14 PM	PH3 MFC set to  0.000000
2/23/2012	1:03:14 PM	SiCl4 MFC set to  0.000000
2/23/2012	1:03:14 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	1:03:15 PM	Tube furnace set to 0
2/23/2012	1:03:45 PM	Helium valve closed
2/23/2012	1:03:45 PM	H2 valve closed
2/23/2012	1:03:45 PM	BCl3 valve closed
2/23/2012	1:03:45 PM	PH3 valve closed
2/23/2012	1:03:45 PM	SiCl4 pre valve closed
2/23/2012	1:03:45 PM	SiCl4 post valve closed
2/23/2012	1:03:45 PM	Bypass valve closed
2/23/2012	1:03:45 PM	Bubbler valve closed
2/23/2012	1:03:45 PM	Main Vac valve opened
2/23/2012	1:03:45 PM	Helium MFC set to  0.000000
2/23/2012	1:03:45 PM	H2 MFC set to  0.000000
2/23/2012	1:03:45 PM	BCl3 MFC set to  0.000000
2/23/2012	1:03:45 PM	PH3 MFC set to  0.000000
2/23/2012	1:03:45 PM	SiCl4 MFC set to  0.000000
2/23/2012	1:03:45 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	1:03:45 PM	Tube furnace set to 0
2/23/2012	1:03:46 PM	Run finished at 1:03 PM
2/23/2012	1:03:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/23/2012	1:13:07 PM	Main Vac valve closed
2/23/2012	1:13:25 PM	Main Vac valve opened
2/23/2012	1:21:42 PM	Recipe started at 1:21 PM
2/23/2012	1:21:42 PM	Helium valve closed
2/23/2012	1:21:42 PM	H2 valve closed
2/23/2012	1:21:42 PM	BCl3 valve closed
2/23/2012	1:21:42 PM	PH3 valve closed
2/23/2012	1:21:42 PM	SiCl4 pre valve closed
2/23/2012	1:21:42 PM	SiCl4 post valve closed
2/23/2012	1:21:42 PM	Main Vac valve closed
2/23/2012	1:21:42 PM	Bypass valve closed
2/23/2012	1:21:42 PM	Bubbler valve closed
2/23/2012	1:21:42 PM	Helium MFC set to  0.000000
2/23/2012	1:21:42 PM	H2 MFC set to  0.000000
2/23/2012	1:21:42 PM	BCl3 MFC set to  0.000000
2/23/2012	1:21:42 PM	PH3 MFC set to  0.000000
2/23/2012	1:21:42 PM	SiCl4 MFC set to  0.000000
2/23/2012	1:21:42 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	1:21:42 PM	Tube furnace set to 0
2/23/2012	1:21:45 PM	Helium valve closed
2/23/2012	1:21:45 PM	BCl3 valve closed
2/23/2012	1:21:45 PM	PH3 valve closed
2/23/2012	1:21:45 PM	SiCl4 pre valve closed
2/23/2012	1:21:45 PM	SiCl4 post valve closed
2/23/2012	1:21:45 PM	Main Vac valve closed
2/23/2012	1:21:45 PM	Bypass valve closed
2/23/2012	1:21:45 PM	Bubbler valve closed
2/23/2012	1:21:45 PM	H2 valve opened
2/23/2012	1:21:45 PM	Helium MFC set to  0.000000
2/23/2012	1:21:45 PM	H2 MFC set to  500.000000
2/23/2012	1:21:45 PM	BCl3 MFC set to  0.000000
2/23/2012	1:21:45 PM	PH3 MFC set to  0.000000
2/23/2012	1:21:45 PM	SiCl4 MFC set to  0.000000
2/23/2012	1:21:45 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	1:21:46 PM	Tube furnace set to 0
2/23/2012	1:22:54 PM	Helium valve closed
2/23/2012	1:22:54 PM	BCl3 valve closed
2/23/2012	1:22:54 PM	PH3 valve closed
2/23/2012	1:22:54 PM	SiCl4 pre valve closed
2/23/2012	1:22:54 PM	SiCl4 post valve closed
2/23/2012	1:22:54 PM	Main Vac valve closed
2/23/2012	1:22:54 PM	Bypass valve closed
2/23/2012	1:22:54 PM	H2 valve opened
2/23/2012	1:22:54 PM	Bubbler valve opened
2/23/2012	1:22:54 PM	Helium MFC set to  0.000000
2/23/2012	1:22:54 PM	H2 MFC set to  500.000000
2/23/2012	1:22:54 PM	BCl3 MFC set to  0.000000
2/23/2012	1:22:54 PM	PH3 MFC set to  0.000000
2/23/2012	1:22:54 PM	SiCl4 MFC set to  0.000000
2/23/2012	1:22:54 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	1:22:54 PM	Tube furnace set to 0
2/23/2012	1:22:55 PM	Helium valve closed
2/23/2012	1:22:55 PM	BCl3 valve closed
2/23/2012	1:22:55 PM	PH3 valve closed
2/23/2012	1:22:55 PM	SiCl4 pre valve closed
2/23/2012	1:22:55 PM	SiCl4 post valve closed
2/23/2012	1:22:55 PM	Main Vac valve closed
2/23/2012	1:22:55 PM	Bypass valve closed
2/23/2012	1:22:55 PM	H2 valve opened
2/23/2012	1:22:55 PM	Bubbler valve opened
2/23/2012	1:22:55 PM	Helium MFC set to  0.000000
2/23/2012	1:22:55 PM	H2 MFC set to  500.000000
2/23/2012	1:22:55 PM	BCl3 MFC set to  0.000000
2/23/2012	1:22:55 PM	PH3 MFC set to  0.000000
2/23/2012	1:22:55 PM	SiCl4 MFC set to  0.000000
2/23/2012	1:22:55 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	1:22:55 PM	Tube furnace set to 950
2/23/2012	1:42:55 PM	Helium valve closed
2/23/2012	1:42:55 PM	PH3 valve closed
2/23/2012	1:42:55 PM	Main Vac valve closed
2/23/2012	1:42:55 PM	Bypass valve closed
2/23/2012	1:42:55 PM	H2 valve opened
2/23/2012	1:42:55 PM	BCl3 valve opened
2/23/2012	1:42:55 PM	SiCl4 pre valve opened
2/23/2012	1:42:55 PM	SiCl4 post valve opened
2/23/2012	1:42:55 PM	Bubbler valve opened
2/23/2012	1:42:55 PM	Helium MFC set to  0.000000
2/23/2012	1:42:55 PM	H2 MFC set to  500.000000
2/23/2012	1:42:55 PM	BCl3 MFC set to  1.000000
2/23/2012	1:42:55 PM	PH3 MFC set to  0.000000
2/23/2012	1:42:55 PM	SiCl4 MFC set to  25.000000
2/23/2012	1:42:55 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	1:42:56 PM	Tube furnace set to 950
2/23/2012	2:04:56 PM	Helium valve closed
2/23/2012	2:04:56 PM	BCl3 valve closed
2/23/2012	2:04:56 PM	PH3 valve closed
2/23/2012	2:04:56 PM	SiCl4 pre valve closed
2/23/2012	2:04:56 PM	SiCl4 post valve closed
2/23/2012	2:04:56 PM	Main Vac valve closed
2/23/2012	2:04:56 PM	Bypass valve closed
2/23/2012	2:04:56 PM	H2 valve opened
2/23/2012	2:04:56 PM	Bubbler valve opened
2/23/2012	2:04:56 PM	Helium MFC set to  0.000000
2/23/2012	2:04:56 PM	H2 MFC set to  500.000000
2/23/2012	2:04:56 PM	BCl3 MFC set to  0.000000
2/23/2012	2:04:56 PM	PH3 MFC set to  0.000000
2/23/2012	2:04:56 PM	SiCl4 MFC set to  0.000000
2/23/2012	2:04:56 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	2:04:56 PM	Tube furnace set to 750
2/23/2012	2:09:56 PM	H2 valve closed
2/23/2012	2:09:56 PM	BCl3 valve closed
2/23/2012	2:09:56 PM	PH3 valve closed
2/23/2012	2:09:56 PM	SiCl4 pre valve closed
2/23/2012	2:09:56 PM	SiCl4 post valve closed
2/23/2012	2:09:56 PM	Main Vac valve closed
2/23/2012	2:09:56 PM	Bypass valve closed
2/23/2012	2:09:56 PM	Helium valve opened
2/23/2012	2:09:56 PM	Bubbler valve opened
2/23/2012	2:09:56 PM	Helium MFC set to  500.000000
2/23/2012	2:09:56 PM	H2 MFC set to  0.000000
2/23/2012	2:09:56 PM	BCl3 MFC set to  0.000000
2/23/2012	2:09:56 PM	PH3 MFC set to  0.000000
2/23/2012	2:09:56 PM	SiCl4 MFC set to  0.000000
2/23/2012	2:09:56 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	2:09:56 PM	Tube furnace set to 0
2/23/2012	2:27:29 PM	Helium valve closed
2/23/2012	2:27:29 PM	H2 valve closed
2/23/2012	2:27:29 PM	BCl3 valve closed
2/23/2012	2:27:29 PM	PH3 valve closed
2/23/2012	2:27:29 PM	SiCl4 pre valve closed
2/23/2012	2:27:29 PM	SiCl4 post valve closed
2/23/2012	2:27:29 PM	Main Vac valve closed
2/23/2012	2:27:29 PM	Bypass valve closed
2/23/2012	2:27:29 PM	Bubbler valve closed
2/23/2012	2:27:29 PM	Helium MFC set to  0.000000
2/23/2012	2:27:29 PM	H2 MFC set to  0.000000
2/23/2012	2:27:29 PM	BCl3 MFC set to  0.000000
2/23/2012	2:27:29 PM	PH3 MFC set to  0.000000
2/23/2012	2:27:29 PM	SiCl4 MFC set to  0.000000
2/23/2012	2:27:29 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	2:27:29 PM	Tube furnace set to 0
2/23/2012	2:27:30 PM	Run finished at 2:27 PM
2/23/2012	2:27:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/23/2012	2:27:52 PM	Recipe started at 2:27 PM
2/23/2012	2:27:52 PM	Helium valve closed
2/23/2012	2:27:52 PM	H2 valve closed
2/23/2012	2:27:52 PM	BCl3 valve closed
2/23/2012	2:27:52 PM	PH3 valve closed
2/23/2012	2:27:52 PM	SiCl4 pre valve closed
2/23/2012	2:27:52 PM	SiCl4 post valve closed
2/23/2012	2:27:52 PM	Main Vac valve closed
2/23/2012	2:27:52 PM	Bypass valve closed
2/23/2012	2:27:52 PM	Bubbler valve closed
2/23/2012	2:27:52 PM	Helium MFC set to  0.000000
2/23/2012	2:27:52 PM	H2 MFC set to  0.000000
2/23/2012	2:27:52 PM	BCl3 MFC set to  0.000000
2/23/2012	2:27:52 PM	PH3 MFC set to  0.000000
2/23/2012	2:27:52 PM	SiCl4 MFC set to  0.000000
2/23/2012	2:27:52 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	2:27:52 PM	Tube furnace set to 0
2/23/2012	2:27:55 PM	H2 valve closed
2/23/2012	2:27:55 PM	BCl3 valve closed
2/23/2012	2:27:55 PM	PH3 valve closed
2/23/2012	2:27:55 PM	SiCl4 pre valve closed
2/23/2012	2:27:55 PM	SiCl4 post valve closed
2/23/2012	2:27:55 PM	Main Vac valve closed
2/23/2012	2:27:55 PM	Bypass valve closed
2/23/2012	2:27:55 PM	Bubbler valve closed
2/23/2012	2:27:55 PM	Helium valve opened
2/23/2012	2:27:55 PM	Helium MFC set to  500.000000
2/23/2012	2:27:55 PM	H2 MFC set to  0.000000
2/23/2012	2:27:55 PM	BCl3 MFC set to  0.000000
2/23/2012	2:27:55 PM	PH3 MFC set to  0.000000
2/23/2012	2:27:55 PM	SiCl4 MFC set to  0.000000
2/23/2012	2:27:55 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	2:27:55 PM	Tube furnace set to 0
2/23/2012	2:27:56 PM	Helium valve closed
2/23/2012	2:27:56 PM	H2 valve closed
2/23/2012	2:27:56 PM	BCl3 valve closed
2/23/2012	2:27:56 PM	PH3 valve closed
2/23/2012	2:27:56 PM	SiCl4 pre valve closed
2/23/2012	2:27:56 PM	SiCl4 post valve closed
2/23/2012	2:27:56 PM	Main Vac valve closed
2/23/2012	2:27:56 PM	Bypass valve closed
2/23/2012	2:27:56 PM	Bubbler valve closed
2/23/2012	2:27:56 PM	Helium MFC set to  0.000000
2/23/2012	2:27:56 PM	H2 MFC set to  0.000000
2/23/2012	2:27:56 PM	BCl3 MFC set to  0.000000
2/23/2012	2:27:56 PM	PH3 MFC set to  0.000000
2/23/2012	2:27:56 PM	SiCl4 MFC set to  0.000000
2/23/2012	2:27:56 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	2:27:56 PM	Tube furnace set to 0
2/23/2012	2:27:57 PM	Run finished at 2:27 PM
2/23/2012	2:27:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/23/2012	2:33:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/23/2012	2:33:51 PM	Recipe started at 2:33 PM
2/23/2012	2:33:51 PM	Helium valve closed
2/23/2012	2:33:51 PM	H2 valve closed
2/23/2012	2:33:51 PM	BCl3 valve closed
2/23/2012	2:33:51 PM	PH3 valve closed
2/23/2012	2:33:51 PM	SiCl4 pre valve closed
2/23/2012	2:33:51 PM	SiCl4 post valve closed
2/23/2012	2:33:51 PM	Main Vac valve closed
2/23/2012	2:33:51 PM	Bubbler valve closed
2/23/2012	2:33:51 PM	Bypass valve opened
2/23/2012	2:33:51 PM	Helium MFC set to  0.000000
2/23/2012	2:33:51 PM	H2 MFC set to  0.000000
2/23/2012	2:33:51 PM	BCl3 MFC set to  0.000000
2/23/2012	2:33:51 PM	PH3 MFC set to  0.000000
2/23/2012	2:33:51 PM	SiCl4 MFC set to  0.000000
2/23/2012	2:33:51 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	2:33:51 PM	Tube furnace set to 0
2/23/2012	2:34:56 PM	Helium valve closed
2/23/2012	2:34:56 PM	H2 valve closed
2/23/2012	2:34:56 PM	BCl3 valve closed
2/23/2012	2:34:56 PM	PH3 valve closed
2/23/2012	2:34:56 PM	SiCl4 pre valve closed
2/23/2012	2:34:56 PM	SiCl4 post valve closed
2/23/2012	2:34:56 PM	Main Vac valve closed
2/23/2012	2:34:56 PM	Bubbler valve closed
2/23/2012	2:34:56 PM	Bypass valve opened
2/23/2012	2:34:56 PM	Helium MFC set to  0.000000
2/23/2012	2:34:56 PM	H2 MFC set to  0.000000
2/23/2012	2:34:56 PM	BCl3 MFC set to  0.000000
2/23/2012	2:34:56 PM	PH3 MFC set to  0.000000
2/23/2012	2:34:56 PM	SiCl4 MFC set to  0.000000
2/23/2012	2:34:56 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	2:34:56 PM	Tube furnace set to 0
2/23/2012	2:35:56 PM	Helium valve closed
2/23/2012	2:35:56 PM	H2 valve closed
2/23/2012	2:35:56 PM	BCl3 valve closed
2/23/2012	2:35:56 PM	PH3 valve closed
2/23/2012	2:35:56 PM	SiCl4 pre valve closed
2/23/2012	2:35:56 PM	SiCl4 post valve closed
2/23/2012	2:35:56 PM	Bypass valve closed
2/23/2012	2:35:56 PM	Bubbler valve closed
2/23/2012	2:35:56 PM	Main Vac valve opened
2/23/2012	2:35:56 PM	Helium MFC set to  0.000000
2/23/2012	2:35:56 PM	H2 MFC set to  0.000000
2/23/2012	2:35:56 PM	BCl3 MFC set to  0.000000
2/23/2012	2:35:56 PM	PH3 MFC set to  0.000000
2/23/2012	2:35:56 PM	SiCl4 MFC set to  0.000000
2/23/2012	2:35:56 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	2:35:56 PM	Tube furnace set to 0
2/23/2012	2:35:57 PM	Run finished at 2:35 PM
2/23/2012	2:35:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/23/2012	2:59:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/23/2012	2:59:46 PM	Recipe started at 2:59 PM
2/23/2012	2:59:46 PM	Helium valve closed
2/23/2012	2:59:46 PM	H2 valve closed
2/23/2012	2:59:46 PM	BCl3 valve closed
2/23/2012	2:59:46 PM	PH3 valve closed
2/23/2012	2:59:46 PM	SiCl4 pre valve closed
2/23/2012	2:59:46 PM	SiCl4 post valve closed
2/23/2012	2:59:46 PM	Main Vac valve closed
2/23/2012	2:59:46 PM	Bubbler valve closed
2/23/2012	2:59:46 PM	Bypass valve opened
2/23/2012	2:59:46 PM	Helium MFC set to  0.000000
2/23/2012	2:59:46 PM	H2 MFC set to  0.000000
2/23/2012	2:59:46 PM	BCl3 MFC set to  0.000000
2/23/2012	2:59:46 PM	PH3 MFC set to  0.000000
2/23/2012	2:59:46 PM	SiCl4 MFC set to  0.000000
2/23/2012	2:59:46 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	2:59:46 PM	Tube furnace set to 0
2/23/2012	2:59:47 PM	Helium valve closed
2/23/2012	2:59:47 PM	H2 valve closed
2/23/2012	2:59:47 PM	BCl3 valve closed
2/23/2012	2:59:47 PM	PH3 valve closed
2/23/2012	2:59:47 PM	SiCl4 pre valve closed
2/23/2012	2:59:47 PM	SiCl4 post valve closed
2/23/2012	2:59:47 PM	Main Vac valve closed
2/23/2012	2:59:47 PM	Bubbler valve closed
2/23/2012	2:59:47 PM	Bypass valve opened
2/23/2012	2:59:47 PM	Helium MFC set to  0.000000
2/23/2012	2:59:47 PM	H2 MFC set to  0.000000
2/23/2012	2:59:47 PM	BCl3 MFC set to  0.000000
2/23/2012	2:59:47 PM	PH3 MFC set to  0.000000
2/23/2012	2:59:47 PM	SiCl4 MFC set to  0.000000
2/23/2012	2:59:47 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	2:59:47 PM	Tube furnace set to 0
2/23/2012	2:59:48 PM	Helium valve closed
2/23/2012	2:59:48 PM	H2 valve closed
2/23/2012	2:59:48 PM	BCl3 valve closed
2/23/2012	2:59:48 PM	PH3 valve closed
2/23/2012	2:59:48 PM	SiCl4 pre valve closed
2/23/2012	2:59:48 PM	SiCl4 post valve closed
2/23/2012	2:59:48 PM	Bypass valve closed
2/23/2012	2:59:48 PM	Bubbler valve closed
2/23/2012	2:59:48 PM	Main Vac valve opened
2/23/2012	2:59:48 PM	Helium MFC set to  0.000000
2/23/2012	2:59:48 PM	H2 MFC set to  0.000000
2/23/2012	2:59:48 PM	BCl3 MFC set to  0.000000
2/23/2012	2:59:48 PM	PH3 MFC set to  0.000000
2/23/2012	2:59:48 PM	SiCl4 MFC set to  0.000000
2/23/2012	2:59:48 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	2:59:48 PM	Tube furnace set to 0
2/23/2012	2:59:50 PM	H2 valve closed
2/23/2012	2:59:50 PM	BCl3 valve closed
2/23/2012	2:59:50 PM	PH3 valve closed
2/23/2012	2:59:50 PM	SiCl4 pre valve closed
2/23/2012	2:59:50 PM	SiCl4 post valve closed
2/23/2012	2:59:50 PM	Bypass valve closed
2/23/2012	2:59:50 PM	Bubbler valve closed
2/23/2012	2:59:50 PM	Helium valve opened
2/23/2012	2:59:50 PM	Main Vac valve opened
2/23/2012	2:59:50 PM	Helium MFC set to  20.000000
2/23/2012	2:59:50 PM	H2 MFC set to  0.000000
2/23/2012	2:59:50 PM	BCl3 MFC set to  0.000000
2/23/2012	2:59:50 PM	PH3 MFC set to  0.000000
2/23/2012	2:59:50 PM	SiCl4 MFC set to  0.000000
2/23/2012	2:59:50 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	2:59:50 PM	Tube furnace set to 0
2/23/2012	3:00:20 PM	Helium valve closed
2/23/2012	3:00:20 PM	H2 valve closed
2/23/2012	3:00:20 PM	BCl3 valve closed
2/23/2012	3:00:20 PM	PH3 valve closed
2/23/2012	3:00:20 PM	SiCl4 pre valve closed
2/23/2012	3:00:20 PM	SiCl4 post valve closed
2/23/2012	3:00:20 PM	Bypass valve closed
2/23/2012	3:00:20 PM	Bubbler valve closed
2/23/2012	3:00:20 PM	Main Vac valve opened
2/23/2012	3:00:20 PM	Helium MFC set to  0.000000
2/23/2012	3:00:20 PM	H2 MFC set to  0.000000
2/23/2012	3:00:20 PM	BCl3 MFC set to  0.000000
2/23/2012	3:00:20 PM	PH3 MFC set to  0.000000
2/23/2012	3:00:20 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:00:20 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:00:20 PM	Tube furnace set to 0
2/23/2012	3:00:50 PM	H2 valve closed
2/23/2012	3:00:50 PM	BCl3 valve closed
2/23/2012	3:00:50 PM	PH3 valve closed
2/23/2012	3:00:50 PM	SiCl4 pre valve closed
2/23/2012	3:00:50 PM	SiCl4 post valve closed
2/23/2012	3:00:50 PM	Bypass valve closed
2/23/2012	3:00:50 PM	Bubbler valve closed
2/23/2012	3:00:50 PM	Helium valve opened
2/23/2012	3:00:50 PM	Main Vac valve opened
2/23/2012	3:00:50 PM	Helium MFC set to  20.000000
2/23/2012	3:00:50 PM	H2 MFC set to  0.000000
2/23/2012	3:00:50 PM	BCl3 MFC set to  0.000000
2/23/2012	3:00:50 PM	PH3 MFC set to  0.000000
2/23/2012	3:00:50 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:00:50 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:00:50 PM	Tube furnace set to 0
2/23/2012	3:01:20 PM	Helium valve closed
2/23/2012	3:01:20 PM	H2 valve closed
2/23/2012	3:01:20 PM	BCl3 valve closed
2/23/2012	3:01:20 PM	PH3 valve closed
2/23/2012	3:01:20 PM	SiCl4 pre valve closed
2/23/2012	3:01:20 PM	SiCl4 post valve closed
2/23/2012	3:01:20 PM	Bypass valve closed
2/23/2012	3:01:20 PM	Bubbler valve closed
2/23/2012	3:01:20 PM	Main Vac valve opened
2/23/2012	3:01:20 PM	Helium MFC set to  0.000000
2/23/2012	3:01:20 PM	H2 MFC set to  0.000000
2/23/2012	3:01:20 PM	BCl3 MFC set to  0.000000
2/23/2012	3:01:20 PM	PH3 MFC set to  0.000000
2/23/2012	3:01:20 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:01:20 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:01:20 PM	Tube furnace set to 0
2/23/2012	3:01:50 PM	H2 valve closed
2/23/2012	3:01:50 PM	BCl3 valve closed
2/23/2012	3:01:50 PM	PH3 valve closed
2/23/2012	3:01:50 PM	SiCl4 pre valve closed
2/23/2012	3:01:50 PM	SiCl4 post valve closed
2/23/2012	3:01:50 PM	Bypass valve closed
2/23/2012	3:01:50 PM	Bubbler valve closed
2/23/2012	3:01:50 PM	Helium valve opened
2/23/2012	3:01:50 PM	Main Vac valve opened
2/23/2012	3:01:50 PM	Helium MFC set to  20.000000
2/23/2012	3:01:50 PM	H2 MFC set to  0.000000
2/23/2012	3:01:50 PM	BCl3 MFC set to  0.000000
2/23/2012	3:01:50 PM	PH3 MFC set to  0.000000
2/23/2012	3:01:50 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:01:50 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:01:51 PM	Tube furnace set to 0
2/23/2012	3:02:21 PM	Helium valve closed
2/23/2012	3:02:21 PM	H2 valve closed
2/23/2012	3:02:21 PM	BCl3 valve closed
2/23/2012	3:02:21 PM	PH3 valve closed
2/23/2012	3:02:21 PM	SiCl4 pre valve closed
2/23/2012	3:02:21 PM	SiCl4 post valve closed
2/23/2012	3:02:21 PM	Bypass valve closed
2/23/2012	3:02:21 PM	Bubbler valve closed
2/23/2012	3:02:21 PM	Main Vac valve opened
2/23/2012	3:02:21 PM	Helium MFC set to  0.000000
2/23/2012	3:02:21 PM	H2 MFC set to  0.000000
2/23/2012	3:02:21 PM	BCl3 MFC set to  0.000000
2/23/2012	3:02:21 PM	PH3 MFC set to  0.000000
2/23/2012	3:02:21 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:02:21 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:02:21 PM	Tube furnace set to 0
2/23/2012	3:02:51 PM	H2 valve closed
2/23/2012	3:02:51 PM	BCl3 valve closed
2/23/2012	3:02:51 PM	PH3 valve closed
2/23/2012	3:02:51 PM	SiCl4 pre valve closed
2/23/2012	3:02:51 PM	SiCl4 post valve closed
2/23/2012	3:02:51 PM	Bypass valve closed
2/23/2012	3:02:51 PM	Bubbler valve closed
2/23/2012	3:02:51 PM	Helium valve opened
2/23/2012	3:02:51 PM	Main Vac valve opened
2/23/2012	3:02:51 PM	Helium MFC set to  20.000000
2/23/2012	3:02:51 PM	H2 MFC set to  0.000000
2/23/2012	3:02:51 PM	BCl3 MFC set to  0.000000
2/23/2012	3:02:51 PM	PH3 MFC set to  0.000000
2/23/2012	3:02:51 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:02:51 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:02:51 PM	Tube furnace set to 0
2/23/2012	3:03:21 PM	Helium valve closed
2/23/2012	3:03:21 PM	H2 valve closed
2/23/2012	3:03:21 PM	BCl3 valve closed
2/23/2012	3:03:21 PM	PH3 valve closed
2/23/2012	3:03:21 PM	SiCl4 pre valve closed
2/23/2012	3:03:21 PM	SiCl4 post valve closed
2/23/2012	3:03:21 PM	Bypass valve closed
2/23/2012	3:03:21 PM	Bubbler valve closed
2/23/2012	3:03:21 PM	Main Vac valve opened
2/23/2012	3:03:21 PM	Helium MFC set to  0.000000
2/23/2012	3:03:21 PM	H2 MFC set to  0.000000
2/23/2012	3:03:21 PM	BCl3 MFC set to  0.000000
2/23/2012	3:03:21 PM	PH3 MFC set to  0.000000
2/23/2012	3:03:21 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:03:21 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:03:21 PM	Tube furnace set to 0
2/23/2012	3:03:51 PM	H2 valve closed
2/23/2012	3:03:51 PM	BCl3 valve closed
2/23/2012	3:03:51 PM	PH3 valve closed
2/23/2012	3:03:51 PM	SiCl4 pre valve closed
2/23/2012	3:03:51 PM	SiCl4 post valve closed
2/23/2012	3:03:51 PM	Bypass valve closed
2/23/2012	3:03:51 PM	Bubbler valve closed
2/23/2012	3:03:51 PM	Helium valve opened
2/23/2012	3:03:51 PM	Main Vac valve opened
2/23/2012	3:03:51 PM	Helium MFC set to  20.000000
2/23/2012	3:03:51 PM	H2 MFC set to  0.000000
2/23/2012	3:03:51 PM	BCl3 MFC set to  0.000000
2/23/2012	3:03:51 PM	PH3 MFC set to  0.000000
2/23/2012	3:03:51 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:03:51 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:03:51 PM	Tube furnace set to 0
2/23/2012	3:04:21 PM	Helium valve closed
2/23/2012	3:04:21 PM	H2 valve closed
2/23/2012	3:04:21 PM	BCl3 valve closed
2/23/2012	3:04:21 PM	PH3 valve closed
2/23/2012	3:04:21 PM	SiCl4 pre valve closed
2/23/2012	3:04:21 PM	SiCl4 post valve closed
2/23/2012	3:04:21 PM	Bypass valve closed
2/23/2012	3:04:21 PM	Bubbler valve closed
2/23/2012	3:04:21 PM	Main Vac valve opened
2/23/2012	3:04:21 PM	Helium MFC set to  0.000000
2/23/2012	3:04:21 PM	H2 MFC set to  0.000000
2/23/2012	3:04:21 PM	BCl3 MFC set to  0.000000
2/23/2012	3:04:21 PM	PH3 MFC set to  0.000000
2/23/2012	3:04:21 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:04:21 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:04:22 PM	Tube furnace set to 0
2/23/2012	3:04:52 PM	H2 valve closed
2/23/2012	3:04:52 PM	BCl3 valve closed
2/23/2012	3:04:52 PM	PH3 valve closed
2/23/2012	3:04:52 PM	SiCl4 pre valve closed
2/23/2012	3:04:52 PM	SiCl4 post valve closed
2/23/2012	3:04:52 PM	Bypass valve closed
2/23/2012	3:04:52 PM	Bubbler valve closed
2/23/2012	3:04:52 PM	Helium valve opened
2/23/2012	3:04:52 PM	Main Vac valve opened
2/23/2012	3:04:52 PM	Helium MFC set to  20.000000
2/23/2012	3:04:52 PM	H2 MFC set to  0.000000
2/23/2012	3:04:52 PM	BCl3 MFC set to  0.000000
2/23/2012	3:04:52 PM	PH3 MFC set to  0.000000
2/23/2012	3:04:52 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:04:52 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:04:52 PM	Tube furnace set to 0
2/23/2012	3:05:22 PM	Helium valve closed
2/23/2012	3:05:22 PM	H2 valve closed
2/23/2012	3:05:22 PM	BCl3 valve closed
2/23/2012	3:05:22 PM	PH3 valve closed
2/23/2012	3:05:22 PM	SiCl4 pre valve closed
2/23/2012	3:05:22 PM	SiCl4 post valve closed
2/23/2012	3:05:22 PM	Bypass valve closed
2/23/2012	3:05:22 PM	Bubbler valve closed
2/23/2012	3:05:22 PM	Main Vac valve opened
2/23/2012	3:05:22 PM	Helium MFC set to  0.000000
2/23/2012	3:05:22 PM	H2 MFC set to  0.000000
2/23/2012	3:05:22 PM	BCl3 MFC set to  0.000000
2/23/2012	3:05:22 PM	PH3 MFC set to  0.000000
2/23/2012	3:05:22 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:05:22 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:05:22 PM	Tube furnace set to 0
2/23/2012	3:05:52 PM	H2 valve closed
2/23/2012	3:05:52 PM	BCl3 valve closed
2/23/2012	3:05:52 PM	PH3 valve closed
2/23/2012	3:05:52 PM	SiCl4 pre valve closed
2/23/2012	3:05:52 PM	SiCl4 post valve closed
2/23/2012	3:05:52 PM	Bypass valve closed
2/23/2012	3:05:52 PM	Bubbler valve closed
2/23/2012	3:05:52 PM	Helium valve opened
2/23/2012	3:05:52 PM	Main Vac valve opened
2/23/2012	3:05:52 PM	Helium MFC set to  20.000000
2/23/2012	3:05:52 PM	H2 MFC set to  0.000000
2/23/2012	3:05:52 PM	BCl3 MFC set to  0.000000
2/23/2012	3:05:52 PM	PH3 MFC set to  0.000000
2/23/2012	3:05:52 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:05:52 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:05:52 PM	Tube furnace set to 0
2/23/2012	3:06:22 PM	Helium valve closed
2/23/2012	3:06:22 PM	H2 valve closed
2/23/2012	3:06:22 PM	BCl3 valve closed
2/23/2012	3:06:22 PM	PH3 valve closed
2/23/2012	3:06:22 PM	SiCl4 pre valve closed
2/23/2012	3:06:22 PM	SiCl4 post valve closed
2/23/2012	3:06:22 PM	Bypass valve closed
2/23/2012	3:06:22 PM	Bubbler valve closed
2/23/2012	3:06:22 PM	Main Vac valve opened
2/23/2012	3:06:22 PM	Helium MFC set to  0.000000
2/23/2012	3:06:22 PM	H2 MFC set to  0.000000
2/23/2012	3:06:22 PM	BCl3 MFC set to  0.000000
2/23/2012	3:06:22 PM	PH3 MFC set to  0.000000
2/23/2012	3:06:22 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:06:22 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:06:22 PM	Tube furnace set to 0
2/23/2012	3:06:52 PM	H2 valve closed
2/23/2012	3:06:52 PM	BCl3 valve closed
2/23/2012	3:06:52 PM	PH3 valve closed
2/23/2012	3:06:52 PM	SiCl4 pre valve closed
2/23/2012	3:06:52 PM	SiCl4 post valve closed
2/23/2012	3:06:52 PM	Bypass valve closed
2/23/2012	3:06:52 PM	Bubbler valve closed
2/23/2012	3:06:52 PM	Helium valve opened
2/23/2012	3:06:52 PM	Main Vac valve opened
2/23/2012	3:06:52 PM	Helium MFC set to  20.000000
2/23/2012	3:06:52 PM	H2 MFC set to  0.000000
2/23/2012	3:06:52 PM	BCl3 MFC set to  0.000000
2/23/2012	3:06:52 PM	PH3 MFC set to  0.000000
2/23/2012	3:06:52 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:06:52 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:06:53 PM	Tube furnace set to 0
2/23/2012	3:07:23 PM	Helium valve closed
2/23/2012	3:07:23 PM	H2 valve closed
2/23/2012	3:07:23 PM	BCl3 valve closed
2/23/2012	3:07:23 PM	PH3 valve closed
2/23/2012	3:07:23 PM	SiCl4 pre valve closed
2/23/2012	3:07:23 PM	SiCl4 post valve closed
2/23/2012	3:07:23 PM	Bypass valve closed
2/23/2012	3:07:23 PM	Bubbler valve closed
2/23/2012	3:07:23 PM	Main Vac valve opened
2/23/2012	3:07:23 PM	Helium MFC set to  0.000000
2/23/2012	3:07:23 PM	H2 MFC set to  0.000000
2/23/2012	3:07:23 PM	BCl3 MFC set to  0.000000
2/23/2012	3:07:23 PM	PH3 MFC set to  0.000000
2/23/2012	3:07:23 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:07:23 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:07:23 PM	Tube furnace set to 0
2/23/2012	3:07:53 PM	H2 valve closed
2/23/2012	3:07:53 PM	BCl3 valve closed
2/23/2012	3:07:53 PM	PH3 valve closed
2/23/2012	3:07:53 PM	SiCl4 pre valve closed
2/23/2012	3:07:53 PM	SiCl4 post valve closed
2/23/2012	3:07:53 PM	Bypass valve closed
2/23/2012	3:07:53 PM	Bubbler valve closed
2/23/2012	3:07:53 PM	Helium valve opened
2/23/2012	3:07:53 PM	Main Vac valve opened
2/23/2012	3:07:53 PM	Helium MFC set to  20.000000
2/23/2012	3:07:53 PM	H2 MFC set to  0.000000
2/23/2012	3:07:53 PM	BCl3 MFC set to  0.000000
2/23/2012	3:07:53 PM	PH3 MFC set to  0.000000
2/23/2012	3:07:53 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:07:53 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:07:53 PM	Tube furnace set to 0
2/23/2012	3:08:23 PM	Helium valve closed
2/23/2012	3:08:23 PM	H2 valve closed
2/23/2012	3:08:23 PM	BCl3 valve closed
2/23/2012	3:08:23 PM	PH3 valve closed
2/23/2012	3:08:23 PM	SiCl4 pre valve closed
2/23/2012	3:08:23 PM	SiCl4 post valve closed
2/23/2012	3:08:23 PM	Bypass valve closed
2/23/2012	3:08:23 PM	Bubbler valve closed
2/23/2012	3:08:23 PM	Main Vac valve opened
2/23/2012	3:08:23 PM	Helium MFC set to  0.000000
2/23/2012	3:08:23 PM	H2 MFC set to  0.000000
2/23/2012	3:08:23 PM	BCl3 MFC set to  0.000000
2/23/2012	3:08:23 PM	PH3 MFC set to  0.000000
2/23/2012	3:08:23 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:08:23 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:08:23 PM	Tube furnace set to 0
2/23/2012	3:08:53 PM	H2 valve closed
2/23/2012	3:08:53 PM	BCl3 valve closed
2/23/2012	3:08:53 PM	PH3 valve closed
2/23/2012	3:08:53 PM	SiCl4 pre valve closed
2/23/2012	3:08:53 PM	SiCl4 post valve closed
2/23/2012	3:08:53 PM	Bypass valve closed
2/23/2012	3:08:53 PM	Bubbler valve closed
2/23/2012	3:08:53 PM	Helium valve opened
2/23/2012	3:08:53 PM	Main Vac valve opened
2/23/2012	3:08:53 PM	Helium MFC set to  20.000000
2/23/2012	3:08:53 PM	H2 MFC set to  0.000000
2/23/2012	3:08:53 PM	BCl3 MFC set to  0.000000
2/23/2012	3:08:53 PM	PH3 MFC set to  0.000000
2/23/2012	3:08:53 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:08:53 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:08:53 PM	Tube furnace set to 0
2/23/2012	3:09:23 PM	Helium valve closed
2/23/2012	3:09:23 PM	H2 valve closed
2/23/2012	3:09:23 PM	BCl3 valve closed
2/23/2012	3:09:23 PM	PH3 valve closed
2/23/2012	3:09:23 PM	SiCl4 pre valve closed
2/23/2012	3:09:23 PM	SiCl4 post valve closed
2/23/2012	3:09:23 PM	Bypass valve closed
2/23/2012	3:09:23 PM	Bubbler valve closed
2/23/2012	3:09:23 PM	Main Vac valve opened
2/23/2012	3:09:23 PM	Helium MFC set to  0.000000
2/23/2012	3:09:23 PM	H2 MFC set to  0.000000
2/23/2012	3:09:23 PM	BCl3 MFC set to  0.000000
2/23/2012	3:09:23 PM	PH3 MFC set to  0.000000
2/23/2012	3:09:23 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:09:23 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:09:24 PM	Tube furnace set to 0
2/23/2012	3:09:25 PM	Run finished at 3:09 PM
2/23/2012	3:09:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/23/2012	3:13:16 PM	Main Vac valve closed
2/23/2012	3:13:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/23/2012	3:13:39 PM	Recipe started at 3:13 PM
2/23/2012	3:13:39 PM	Helium valve closed
2/23/2012	3:13:39 PM	H2 valve closed
2/23/2012	3:13:39 PM	BCl3 valve closed
2/23/2012	3:13:39 PM	PH3 valve closed
2/23/2012	3:13:39 PM	SiCl4 pre valve closed
2/23/2012	3:13:39 PM	SiCl4 post valve closed
2/23/2012	3:13:39 PM	Main Vac valve closed
2/23/2012	3:13:39 PM	Bubbler valve closed
2/23/2012	3:13:39 PM	Bypass valve opened
2/23/2012	3:13:39 PM	Helium MFC set to  0.000000
2/23/2012	3:13:39 PM	H2 MFC set to  0.000000
2/23/2012	3:13:39 PM	BCl3 MFC set to  0.000000
2/23/2012	3:13:39 PM	PH3 MFC set to  0.000000
2/23/2012	3:13:39 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:13:39 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:13:39 PM	Tube furnace set to 0
2/23/2012	3:13:39 PM	Helium valve closed
2/23/2012	3:13:39 PM	H2 valve closed
2/23/2012	3:13:39 PM	BCl3 valve closed
2/23/2012	3:13:39 PM	PH3 valve closed
2/23/2012	3:13:39 PM	SiCl4 pre valve closed
2/23/2012	3:13:39 PM	SiCl4 post valve closed
2/23/2012	3:13:39 PM	Main Vac valve closed
2/23/2012	3:13:39 PM	Bubbler valve closed
2/23/2012	3:13:39 PM	Bypass valve opened
2/23/2012	3:13:39 PM	Helium MFC set to  0.000000
2/23/2012	3:13:39 PM	H2 MFC set to  0.000000
2/23/2012	3:13:39 PM	BCl3 MFC set to  0.000000
2/23/2012	3:13:39 PM	PH3 MFC set to  0.000000
2/23/2012	3:13:39 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:13:39 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:13:39 PM	Tube furnace set to 0
2/23/2012	3:13:41 PM	Helium valve closed
2/23/2012	3:13:41 PM	H2 valve closed
2/23/2012	3:13:41 PM	BCl3 valve closed
2/23/2012	3:13:41 PM	PH3 valve closed
2/23/2012	3:13:41 PM	SiCl4 pre valve closed
2/23/2012	3:13:41 PM	SiCl4 post valve closed
2/23/2012	3:13:41 PM	Bypass valve closed
2/23/2012	3:13:41 PM	Bubbler valve closed
2/23/2012	3:13:41 PM	Main Vac valve opened
2/23/2012	3:13:41 PM	Helium MFC set to  0.000000
2/23/2012	3:13:41 PM	H2 MFC set to  0.000000
2/23/2012	3:13:41 PM	BCl3 MFC set to  0.000000
2/23/2012	3:13:41 PM	PH3 MFC set to  0.000000
2/23/2012	3:13:41 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:13:41 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:13:41 PM	Tube furnace set to 0
2/23/2012	3:13:42 PM	H2 valve closed
2/23/2012	3:13:42 PM	BCl3 valve closed
2/23/2012	3:13:42 PM	PH3 valve closed
2/23/2012	3:13:42 PM	SiCl4 pre valve closed
2/23/2012	3:13:42 PM	SiCl4 post valve closed
2/23/2012	3:13:42 PM	Bypass valve closed
2/23/2012	3:13:42 PM	Bubbler valve closed
2/23/2012	3:13:42 PM	Helium valve opened
2/23/2012	3:13:42 PM	Main Vac valve opened
2/23/2012	3:13:42 PM	Helium MFC set to  20.000000
2/23/2012	3:13:42 PM	H2 MFC set to  0.000000
2/23/2012	3:13:42 PM	BCl3 MFC set to  0.000000
2/23/2012	3:13:42 PM	PH3 MFC set to  0.000000
2/23/2012	3:13:42 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:13:42 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:13:42 PM	Tube furnace set to 0
2/23/2012	3:14:12 PM	Helium valve closed
2/23/2012	3:14:12 PM	H2 valve closed
2/23/2012	3:14:12 PM	BCl3 valve closed
2/23/2012	3:14:12 PM	PH3 valve closed
2/23/2012	3:14:12 PM	SiCl4 pre valve closed
2/23/2012	3:14:12 PM	SiCl4 post valve closed
2/23/2012	3:14:12 PM	Bypass valve closed
2/23/2012	3:14:12 PM	Bubbler valve closed
2/23/2012	3:14:12 PM	Main Vac valve opened
2/23/2012	3:14:12 PM	Helium MFC set to  0.000000
2/23/2012	3:14:12 PM	H2 MFC set to  0.000000
2/23/2012	3:14:12 PM	BCl3 MFC set to  0.000000
2/23/2012	3:14:12 PM	PH3 MFC set to  0.000000
2/23/2012	3:14:12 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:14:12 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:14:12 PM	Tube furnace set to 0
2/23/2012	3:14:42 PM	H2 valve closed
2/23/2012	3:14:42 PM	BCl3 valve closed
2/23/2012	3:14:42 PM	PH3 valve closed
2/23/2012	3:14:42 PM	SiCl4 pre valve closed
2/23/2012	3:14:42 PM	SiCl4 post valve closed
2/23/2012	3:14:42 PM	Bypass valve closed
2/23/2012	3:14:42 PM	Bubbler valve closed
2/23/2012	3:14:42 PM	Helium valve opened
2/23/2012	3:14:42 PM	Main Vac valve opened
2/23/2012	3:14:42 PM	Helium MFC set to  20.000000
2/23/2012	3:14:42 PM	H2 MFC set to  0.000000
2/23/2012	3:14:42 PM	BCl3 MFC set to  0.000000
2/23/2012	3:14:42 PM	PH3 MFC set to  0.000000
2/23/2012	3:14:42 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:14:42 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:14:43 PM	Tube furnace set to 0
2/23/2012	3:15:13 PM	Helium valve closed
2/23/2012	3:15:13 PM	H2 valve closed
2/23/2012	3:15:13 PM	BCl3 valve closed
2/23/2012	3:15:13 PM	PH3 valve closed
2/23/2012	3:15:13 PM	SiCl4 pre valve closed
2/23/2012	3:15:13 PM	SiCl4 post valve closed
2/23/2012	3:15:13 PM	Bypass valve closed
2/23/2012	3:15:13 PM	Bubbler valve closed
2/23/2012	3:15:13 PM	Main Vac valve opened
2/23/2012	3:15:13 PM	Helium MFC set to  0.000000
2/23/2012	3:15:13 PM	H2 MFC set to  0.000000
2/23/2012	3:15:13 PM	BCl3 MFC set to  0.000000
2/23/2012	3:15:13 PM	PH3 MFC set to  0.000000
2/23/2012	3:15:13 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:15:13 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:15:13 PM	Tube furnace set to 0
2/23/2012	3:15:43 PM	H2 valve closed
2/23/2012	3:15:43 PM	BCl3 valve closed
2/23/2012	3:15:43 PM	PH3 valve closed
2/23/2012	3:15:43 PM	SiCl4 pre valve closed
2/23/2012	3:15:43 PM	SiCl4 post valve closed
2/23/2012	3:15:43 PM	Bypass valve closed
2/23/2012	3:15:43 PM	Bubbler valve closed
2/23/2012	3:15:43 PM	Helium valve opened
2/23/2012	3:15:43 PM	Main Vac valve opened
2/23/2012	3:15:43 PM	Helium MFC set to  20.000000
2/23/2012	3:15:43 PM	H2 MFC set to  0.000000
2/23/2012	3:15:43 PM	BCl3 MFC set to  0.000000
2/23/2012	3:15:43 PM	PH3 MFC set to  0.000000
2/23/2012	3:15:43 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:15:43 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:15:43 PM	Tube furnace set to 0
2/23/2012	3:16:13 PM	Helium valve closed
2/23/2012	3:16:13 PM	H2 valve closed
2/23/2012	3:16:13 PM	BCl3 valve closed
2/23/2012	3:16:13 PM	PH3 valve closed
2/23/2012	3:16:13 PM	SiCl4 pre valve closed
2/23/2012	3:16:13 PM	SiCl4 post valve closed
2/23/2012	3:16:13 PM	Bypass valve closed
2/23/2012	3:16:13 PM	Bubbler valve closed
2/23/2012	3:16:13 PM	Main Vac valve opened
2/23/2012	3:16:13 PM	Helium MFC set to  0.000000
2/23/2012	3:16:13 PM	H2 MFC set to  0.000000
2/23/2012	3:16:13 PM	BCl3 MFC set to  0.000000
2/23/2012	3:16:13 PM	PH3 MFC set to  0.000000
2/23/2012	3:16:13 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:16:13 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:16:13 PM	Tube furnace set to 0
2/23/2012	3:16:43 PM	H2 valve closed
2/23/2012	3:16:43 PM	BCl3 valve closed
2/23/2012	3:16:43 PM	PH3 valve closed
2/23/2012	3:16:43 PM	SiCl4 pre valve closed
2/23/2012	3:16:43 PM	SiCl4 post valve closed
2/23/2012	3:16:43 PM	Bypass valve closed
2/23/2012	3:16:43 PM	Bubbler valve closed
2/23/2012	3:16:43 PM	Helium valve opened
2/23/2012	3:16:43 PM	Main Vac valve opened
2/23/2012	3:16:43 PM	Helium MFC set to  20.000000
2/23/2012	3:16:43 PM	H2 MFC set to  0.000000
2/23/2012	3:16:43 PM	BCl3 MFC set to  0.000000
2/23/2012	3:16:43 PM	PH3 MFC set to  0.000000
2/23/2012	3:16:43 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:16:43 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:16:43 PM	Tube furnace set to 0
2/23/2012	3:17:13 PM	Helium valve closed
2/23/2012	3:17:13 PM	H2 valve closed
2/23/2012	3:17:13 PM	BCl3 valve closed
2/23/2012	3:17:13 PM	PH3 valve closed
2/23/2012	3:17:13 PM	SiCl4 pre valve closed
2/23/2012	3:17:13 PM	SiCl4 post valve closed
2/23/2012	3:17:13 PM	Bypass valve closed
2/23/2012	3:17:13 PM	Bubbler valve closed
2/23/2012	3:17:13 PM	Main Vac valve opened
2/23/2012	3:17:13 PM	Helium MFC set to  0.000000
2/23/2012	3:17:13 PM	H2 MFC set to  0.000000
2/23/2012	3:17:13 PM	BCl3 MFC set to  0.000000
2/23/2012	3:17:13 PM	PH3 MFC set to  0.000000
2/23/2012	3:17:13 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:17:13 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:17:14 PM	Tube furnace set to 0
2/23/2012	3:17:44 PM	H2 valve closed
2/23/2012	3:17:44 PM	BCl3 valve closed
2/23/2012	3:17:44 PM	PH3 valve closed
2/23/2012	3:17:44 PM	SiCl4 pre valve closed
2/23/2012	3:17:44 PM	SiCl4 post valve closed
2/23/2012	3:17:44 PM	Bypass valve closed
2/23/2012	3:17:44 PM	Bubbler valve closed
2/23/2012	3:17:44 PM	Helium valve opened
2/23/2012	3:17:44 PM	Main Vac valve opened
2/23/2012	3:17:44 PM	Helium MFC set to  20.000000
2/23/2012	3:17:44 PM	H2 MFC set to  0.000000
2/23/2012	3:17:44 PM	BCl3 MFC set to  0.000000
2/23/2012	3:17:44 PM	PH3 MFC set to  0.000000
2/23/2012	3:17:44 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:17:44 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:17:44 PM	Tube furnace set to 0
2/23/2012	3:18:14 PM	Helium valve closed
2/23/2012	3:18:14 PM	H2 valve closed
2/23/2012	3:18:14 PM	BCl3 valve closed
2/23/2012	3:18:14 PM	PH3 valve closed
2/23/2012	3:18:14 PM	SiCl4 pre valve closed
2/23/2012	3:18:14 PM	SiCl4 post valve closed
2/23/2012	3:18:14 PM	Bypass valve closed
2/23/2012	3:18:14 PM	Bubbler valve closed
2/23/2012	3:18:14 PM	Main Vac valve opened
2/23/2012	3:18:14 PM	Helium MFC set to  0.000000
2/23/2012	3:18:14 PM	H2 MFC set to  0.000000
2/23/2012	3:18:14 PM	BCl3 MFC set to  0.000000
2/23/2012	3:18:14 PM	PH3 MFC set to  0.000000
2/23/2012	3:18:14 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:18:14 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:18:14 PM	Tube furnace set to 0
2/23/2012	3:18:44 PM	H2 valve closed
2/23/2012	3:18:44 PM	BCl3 valve closed
2/23/2012	3:18:44 PM	PH3 valve closed
2/23/2012	3:18:44 PM	SiCl4 pre valve closed
2/23/2012	3:18:44 PM	SiCl4 post valve closed
2/23/2012	3:18:44 PM	Bypass valve closed
2/23/2012	3:18:44 PM	Bubbler valve closed
2/23/2012	3:18:44 PM	Helium valve opened
2/23/2012	3:18:44 PM	Main Vac valve opened
2/23/2012	3:18:44 PM	Helium MFC set to  20.000000
2/23/2012	3:18:44 PM	H2 MFC set to  0.000000
2/23/2012	3:18:44 PM	BCl3 MFC set to  0.000000
2/23/2012	3:18:44 PM	PH3 MFC set to  0.000000
2/23/2012	3:18:44 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:18:44 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:18:44 PM	Tube furnace set to 0
2/23/2012	3:19:14 PM	Helium valve closed
2/23/2012	3:19:14 PM	H2 valve closed
2/23/2012	3:19:14 PM	BCl3 valve closed
2/23/2012	3:19:14 PM	PH3 valve closed
2/23/2012	3:19:14 PM	SiCl4 pre valve closed
2/23/2012	3:19:14 PM	SiCl4 post valve closed
2/23/2012	3:19:14 PM	Bypass valve closed
2/23/2012	3:19:14 PM	Bubbler valve closed
2/23/2012	3:19:14 PM	Main Vac valve opened
2/23/2012	3:19:14 PM	Helium MFC set to  0.000000
2/23/2012	3:19:14 PM	H2 MFC set to  0.000000
2/23/2012	3:19:14 PM	BCl3 MFC set to  0.000000
2/23/2012	3:19:14 PM	PH3 MFC set to  0.000000
2/23/2012	3:19:14 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:19:14 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:19:14 PM	Tube furnace set to 0
2/23/2012	3:19:44 PM	H2 valve closed
2/23/2012	3:19:44 PM	BCl3 valve closed
2/23/2012	3:19:44 PM	PH3 valve closed
2/23/2012	3:19:44 PM	SiCl4 pre valve closed
2/23/2012	3:19:44 PM	SiCl4 post valve closed
2/23/2012	3:19:44 PM	Bypass valve closed
2/23/2012	3:19:44 PM	Bubbler valve closed
2/23/2012	3:19:44 PM	Helium valve opened
2/23/2012	3:19:44 PM	Main Vac valve opened
2/23/2012	3:19:44 PM	Helium MFC set to  20.000000
2/23/2012	3:19:44 PM	H2 MFC set to  0.000000
2/23/2012	3:19:44 PM	BCl3 MFC set to  0.000000
2/23/2012	3:19:44 PM	PH3 MFC set to  0.000000
2/23/2012	3:19:45 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:19:45 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:19:45 PM	Tube furnace set to 0
2/23/2012	3:20:15 PM	Helium valve closed
2/23/2012	3:20:15 PM	H2 valve closed
2/23/2012	3:20:15 PM	BCl3 valve closed
2/23/2012	3:20:15 PM	PH3 valve closed
2/23/2012	3:20:15 PM	SiCl4 pre valve closed
2/23/2012	3:20:15 PM	SiCl4 post valve closed
2/23/2012	3:20:15 PM	Bypass valve closed
2/23/2012	3:20:15 PM	Bubbler valve closed
2/23/2012	3:20:15 PM	Main Vac valve opened
2/23/2012	3:20:15 PM	Helium MFC set to  0.000000
2/23/2012	3:20:15 PM	H2 MFC set to  0.000000
2/23/2012	3:20:15 PM	BCl3 MFC set to  0.000000
2/23/2012	3:20:15 PM	PH3 MFC set to  0.000000
2/23/2012	3:20:15 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:20:15 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:20:15 PM	Tube furnace set to 0
2/23/2012	3:20:45 PM	H2 valve closed
2/23/2012	3:20:45 PM	BCl3 valve closed
2/23/2012	3:20:45 PM	PH3 valve closed
2/23/2012	3:20:45 PM	SiCl4 pre valve closed
2/23/2012	3:20:45 PM	SiCl4 post valve closed
2/23/2012	3:20:45 PM	Bypass valve closed
2/23/2012	3:20:45 PM	Bubbler valve closed
2/23/2012	3:20:45 PM	Helium valve opened
2/23/2012	3:20:45 PM	Main Vac valve opened
2/23/2012	3:20:45 PM	Helium MFC set to  20.000000
2/23/2012	3:20:45 PM	H2 MFC set to  0.000000
2/23/2012	3:20:45 PM	BCl3 MFC set to  0.000000
2/23/2012	3:20:45 PM	PH3 MFC set to  0.000000
2/23/2012	3:20:45 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:20:45 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:20:45 PM	Tube furnace set to 0
2/23/2012	3:21:15 PM	Helium valve closed
2/23/2012	3:21:15 PM	H2 valve closed
2/23/2012	3:21:15 PM	BCl3 valve closed
2/23/2012	3:21:15 PM	PH3 valve closed
2/23/2012	3:21:15 PM	SiCl4 pre valve closed
2/23/2012	3:21:15 PM	SiCl4 post valve closed
2/23/2012	3:21:15 PM	Bypass valve closed
2/23/2012	3:21:15 PM	Bubbler valve closed
2/23/2012	3:21:15 PM	Main Vac valve opened
2/23/2012	3:21:15 PM	Helium MFC set to  0.000000
2/23/2012	3:21:15 PM	H2 MFC set to  0.000000
2/23/2012	3:21:15 PM	BCl3 MFC set to  0.000000
2/23/2012	3:21:15 PM	PH3 MFC set to  0.000000
2/23/2012	3:21:15 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:21:15 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:21:15 PM	Tube furnace set to 0
2/23/2012	3:21:45 PM	H2 valve closed
2/23/2012	3:21:45 PM	BCl3 valve closed
2/23/2012	3:21:45 PM	PH3 valve closed
2/23/2012	3:21:45 PM	SiCl4 pre valve closed
2/23/2012	3:21:45 PM	SiCl4 post valve closed
2/23/2012	3:21:45 PM	Bypass valve closed
2/23/2012	3:21:45 PM	Bubbler valve closed
2/23/2012	3:21:45 PM	Helium valve opened
2/23/2012	3:21:45 PM	Main Vac valve opened
2/23/2012	3:21:45 PM	Helium MFC set to  20.000000
2/23/2012	3:21:45 PM	H2 MFC set to  0.000000
2/23/2012	3:21:45 PM	BCl3 MFC set to  0.000000
2/23/2012	3:21:45 PM	PH3 MFC set to  0.000000
2/23/2012	3:21:45 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:21:45 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:21:46 PM	Tube furnace set to 0
2/23/2012	3:22:16 PM	Helium valve closed
2/23/2012	3:22:16 PM	H2 valve closed
2/23/2012	3:22:16 PM	BCl3 valve closed
2/23/2012	3:22:16 PM	PH3 valve closed
2/23/2012	3:22:16 PM	SiCl4 pre valve closed
2/23/2012	3:22:16 PM	SiCl4 post valve closed
2/23/2012	3:22:16 PM	Bypass valve closed
2/23/2012	3:22:16 PM	Bubbler valve closed
2/23/2012	3:22:16 PM	Main Vac valve opened
2/23/2012	3:22:16 PM	Helium MFC set to  0.000000
2/23/2012	3:22:16 PM	H2 MFC set to  0.000000
2/23/2012	3:22:16 PM	BCl3 MFC set to  0.000000
2/23/2012	3:22:16 PM	PH3 MFC set to  0.000000
2/23/2012	3:22:16 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:22:16 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:22:16 PM	Tube furnace set to 0
2/23/2012	3:22:46 PM	H2 valve closed
2/23/2012	3:22:46 PM	BCl3 valve closed
2/23/2012	3:22:46 PM	PH3 valve closed
2/23/2012	3:22:46 PM	SiCl4 pre valve closed
2/23/2012	3:22:46 PM	SiCl4 post valve closed
2/23/2012	3:22:46 PM	Bypass valve closed
2/23/2012	3:22:46 PM	Bubbler valve closed
2/23/2012	3:22:46 PM	Helium valve opened
2/23/2012	3:22:46 PM	Main Vac valve opened
2/23/2012	3:22:46 PM	Helium MFC set to  20.000000
2/23/2012	3:22:46 PM	H2 MFC set to  0.000000
2/23/2012	3:22:46 PM	BCl3 MFC set to  0.000000
2/23/2012	3:22:46 PM	PH3 MFC set to  0.000000
2/23/2012	3:22:46 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:22:46 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:22:46 PM	Tube furnace set to 0
2/23/2012	3:23:16 PM	Helium valve closed
2/23/2012	3:23:16 PM	H2 valve closed
2/23/2012	3:23:16 PM	BCl3 valve closed
2/23/2012	3:23:16 PM	PH3 valve closed
2/23/2012	3:23:16 PM	SiCl4 pre valve closed
2/23/2012	3:23:16 PM	SiCl4 post valve closed
2/23/2012	3:23:16 PM	Bypass valve closed
2/23/2012	3:23:16 PM	Bubbler valve closed
2/23/2012	3:23:16 PM	Main Vac valve opened
2/23/2012	3:23:16 PM	Helium MFC set to  0.000000
2/23/2012	3:23:16 PM	H2 MFC set to  0.000000
2/23/2012	3:23:16 PM	BCl3 MFC set to  0.000000
2/23/2012	3:23:16 PM	PH3 MFC set to  0.000000
2/23/2012	3:23:16 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:23:16 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:23:16 PM	Tube furnace set to 0
2/23/2012	3:23:17 PM	Run finished at 3:23 PM
2/23/2012	3:23:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/23/2012	3:25:35 PM	Main Vac valve closed
2/23/2012	3:25:57 PM	Main Vac valve opened
2/23/2012	3:26:39 PM	Main Vac valve closed
2/23/2012	3:26:50 PM	Main Vac valve opened
2/23/2012	3:27:54 PM	Recipe started at 3:27 PM
2/23/2012	3:27:55 PM	Helium valve closed
2/23/2012	3:27:55 PM	H2 valve closed
2/23/2012	3:27:55 PM	BCl3 valve closed
2/23/2012	3:27:55 PM	PH3 valve closed
2/23/2012	3:27:55 PM	SiCl4 pre valve closed
2/23/2012	3:27:55 PM	SiCl4 post valve closed
2/23/2012	3:27:55 PM	Main Vac valve closed
2/23/2012	3:27:55 PM	Bypass valve closed
2/23/2012	3:27:55 PM	Bubbler valve closed
2/23/2012	3:27:55 PM	Helium MFC set to  0.000000
2/23/2012	3:27:55 PM	H2 MFC set to  0.000000
2/23/2012	3:27:55 PM	BCl3 MFC set to  0.000000
2/23/2012	3:27:55 PM	PH3 MFC set to  0.000000
2/23/2012	3:27:55 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:27:55 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:27:55 PM	Tube furnace set to 0
2/23/2012	3:27:58 PM	Helium valve closed
2/23/2012	3:27:58 PM	BCl3 valve closed
2/23/2012	3:27:58 PM	PH3 valve closed
2/23/2012	3:27:58 PM	SiCl4 pre valve closed
2/23/2012	3:27:58 PM	SiCl4 post valve closed
2/23/2012	3:27:58 PM	Main Vac valve closed
2/23/2012	3:27:58 PM	Bypass valve closed
2/23/2012	3:27:58 PM	Bubbler valve closed
2/23/2012	3:27:58 PM	H2 valve opened
2/23/2012	3:27:58 PM	Helium MFC set to  0.000000
2/23/2012	3:27:58 PM	H2 MFC set to  500.000000
2/23/2012	3:27:58 PM	BCl3 MFC set to  0.000000
2/23/2012	3:27:58 PM	PH3 MFC set to  0.000000
2/23/2012	3:27:58 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:27:58 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:27:58 PM	Tube furnace set to 0
2/23/2012	3:29:07 PM	Helium valve closed
2/23/2012	3:29:07 PM	BCl3 valve closed
2/23/2012	3:29:07 PM	PH3 valve closed
2/23/2012	3:29:07 PM	SiCl4 pre valve closed
2/23/2012	3:29:07 PM	SiCl4 post valve closed
2/23/2012	3:29:07 PM	Main Vac valve closed
2/23/2012	3:29:07 PM	Bypass valve closed
2/23/2012	3:29:07 PM	H2 valve opened
2/23/2012	3:29:07 PM	Bubbler valve opened
2/23/2012	3:29:07 PM	Helium MFC set to  0.000000
2/23/2012	3:29:07 PM	H2 MFC set to  500.000000
2/23/2012	3:29:07 PM	BCl3 MFC set to  0.000000
2/23/2012	3:29:07 PM	PH3 MFC set to  0.000000
2/23/2012	3:29:07 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:29:07 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:29:07 PM	Tube furnace set to 0
2/23/2012	3:29:08 PM	Helium valve closed
2/23/2012	3:29:08 PM	BCl3 valve closed
2/23/2012	3:29:08 PM	PH3 valve closed
2/23/2012	3:29:08 PM	SiCl4 pre valve closed
2/23/2012	3:29:08 PM	SiCl4 post valve closed
2/23/2012	3:29:08 PM	Main Vac valve closed
2/23/2012	3:29:08 PM	Bypass valve closed
2/23/2012	3:29:08 PM	H2 valve opened
2/23/2012	3:29:08 PM	Bubbler valve opened
2/23/2012	3:29:08 PM	Helium MFC set to  0.000000
2/23/2012	3:29:08 PM	H2 MFC set to  500.000000
2/23/2012	3:29:08 PM	BCl3 MFC set to  0.000000
2/23/2012	3:29:08 PM	PH3 MFC set to  0.000000
2/23/2012	3:29:08 PM	SiCl4 MFC set to  0.000000
2/23/2012	3:29:08 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:29:08 PM	Tube furnace set to 950
2/23/2012	3:49:08 PM	Helium valve closed
2/23/2012	3:49:08 PM	PH3 valve closed
2/23/2012	3:49:08 PM	Main Vac valve closed
2/23/2012	3:49:08 PM	Bypass valve closed
2/23/2012	3:49:08 PM	H2 valve opened
2/23/2012	3:49:08 PM	BCl3 valve opened
2/23/2012	3:49:08 PM	SiCl4 pre valve opened
2/23/2012	3:49:08 PM	SiCl4 post valve opened
2/23/2012	3:49:08 PM	Bubbler valve opened
2/23/2012	3:49:08 PM	Helium MFC set to  0.000000
2/23/2012	3:49:08 PM	H2 MFC set to  500.000000
2/23/2012	3:49:08 PM	BCl3 MFC set to  1.000000
2/23/2012	3:49:08 PM	PH3 MFC set to  0.000000
2/23/2012	3:49:08 PM	SiCl4 MFC set to  25.000000
2/23/2012	3:49:08 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	3:49:08 PM	Tube furnace set to 950
2/23/2012	4:09:08 PM	Helium valve closed
2/23/2012	4:09:08 PM	BCl3 valve closed
2/23/2012	4:09:08 PM	PH3 valve closed
2/23/2012	4:09:08 PM	SiCl4 pre valve closed
2/23/2012	4:09:08 PM	SiCl4 post valve closed
2/23/2012	4:09:08 PM	Main Vac valve closed
2/23/2012	4:09:08 PM	Bypass valve closed
2/23/2012	4:09:08 PM	H2 valve opened
2/23/2012	4:09:08 PM	Bubbler valve opened
2/23/2012	4:09:08 PM	Helium MFC set to  0.000000
2/23/2012	4:09:08 PM	H2 MFC set to  500.000000
2/23/2012	4:09:08 PM	BCl3 MFC set to  0.000000
2/23/2012	4:09:08 PM	PH3 MFC set to  0.000000
2/23/2012	4:09:08 PM	SiCl4 MFC set to  0.000000
2/23/2012	4:09:08 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	4:09:09 PM	Tube furnace set to 750
2/23/2012	4:14:09 PM	H2 valve closed
2/23/2012	4:14:09 PM	BCl3 valve closed
2/23/2012	4:14:09 PM	PH3 valve closed
2/23/2012	4:14:09 PM	SiCl4 pre valve closed
2/23/2012	4:14:09 PM	SiCl4 post valve closed
2/23/2012	4:14:09 PM	Main Vac valve closed
2/23/2012	4:14:09 PM	Bypass valve closed
2/23/2012	4:14:09 PM	Helium valve opened
2/23/2012	4:14:09 PM	Bubbler valve opened
2/23/2012	4:14:09 PM	Helium MFC set to  500.000000
2/23/2012	4:14:09 PM	H2 MFC set to  0.000000
2/23/2012	4:14:09 PM	BCl3 MFC set to  0.000000
2/23/2012	4:14:09 PM	PH3 MFC set to  0.000000
2/23/2012	4:14:09 PM	SiCl4 MFC set to  0.000000
2/23/2012	4:14:09 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	4:14:09 PM	Tube furnace set to 0
2/23/2012	4:29:13 PM	Helium valve closed
2/23/2012	4:29:13 PM	H2 valve closed
2/23/2012	4:29:13 PM	BCl3 valve closed
2/23/2012	4:29:13 PM	PH3 valve closed
2/23/2012	4:29:13 PM	SiCl4 pre valve closed
2/23/2012	4:29:13 PM	SiCl4 post valve closed
2/23/2012	4:29:13 PM	Main Vac valve closed
2/23/2012	4:29:13 PM	Bypass valve closed
2/23/2012	4:29:13 PM	Bubbler valve closed
2/23/2012	4:29:13 PM	Helium MFC set to  0.000000
2/23/2012	4:29:13 PM	H2 MFC set to  0.000000
2/23/2012	4:29:13 PM	BCl3 MFC set to  0.000000
2/23/2012	4:29:13 PM	PH3 MFC set to  0.000000
2/23/2012	4:29:13 PM	SiCl4 MFC set to  0.000000
2/23/2012	4:29:13 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	4:29:13 PM	Tube furnace set to 0
2/23/2012	4:29:14 PM	Run finished at 4:29 PM
2/23/2012	4:29:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/23/2012	4:29:20 PM	Recipe started at 4:29 PM
2/23/2012	4:29:20 PM	Helium valve closed
2/23/2012	4:29:20 PM	H2 valve closed
2/23/2012	4:29:20 PM	BCl3 valve closed
2/23/2012	4:29:20 PM	PH3 valve closed
2/23/2012	4:29:20 PM	SiCl4 pre valve closed
2/23/2012	4:29:20 PM	SiCl4 post valve closed
2/23/2012	4:29:20 PM	Main Vac valve closed
2/23/2012	4:29:20 PM	Bypass valve closed
2/23/2012	4:29:20 PM	Bubbler valve closed
2/23/2012	4:29:20 PM	Helium MFC set to  0.000000
2/23/2012	4:29:20 PM	H2 MFC set to  0.000000
2/23/2012	4:29:20 PM	BCl3 MFC set to  0.000000
2/23/2012	4:29:20 PM	PH3 MFC set to  0.000000
2/23/2012	4:29:20 PM	SiCl4 MFC set to  0.000000
2/23/2012	4:29:20 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	4:29:20 PM	Tube furnace set to 0
2/23/2012	4:29:23 PM	H2 valve closed
2/23/2012	4:29:23 PM	BCl3 valve closed
2/23/2012	4:29:23 PM	PH3 valve closed
2/23/2012	4:29:23 PM	SiCl4 pre valve closed
2/23/2012	4:29:23 PM	SiCl4 post valve closed
2/23/2012	4:29:23 PM	Main Vac valve closed
2/23/2012	4:29:23 PM	Bypass valve closed
2/23/2012	4:29:23 PM	Bubbler valve closed
2/23/2012	4:29:23 PM	Helium valve opened
2/23/2012	4:29:23 PM	Helium MFC set to  500.000000
2/23/2012	4:29:23 PM	H2 MFC set to  0.000000
2/23/2012	4:29:23 PM	BCl3 MFC set to  0.000000
2/23/2012	4:29:23 PM	PH3 MFC set to  0.000000
2/23/2012	4:29:23 PM	SiCl4 MFC set to  0.000000
2/23/2012	4:29:23 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	4:29:24 PM	Tube furnace set to 0
2/23/2012	4:29:24 PM	Helium valve closed
2/23/2012	4:29:24 PM	H2 valve closed
2/23/2012	4:29:24 PM	BCl3 valve closed
2/23/2012	4:29:24 PM	PH3 valve closed
2/23/2012	4:29:24 PM	SiCl4 pre valve closed
2/23/2012	4:29:24 PM	SiCl4 post valve closed
2/23/2012	4:29:24 PM	Main Vac valve closed
2/23/2012	4:29:24 PM	Bypass valve closed
2/23/2012	4:29:24 PM	Bubbler valve closed
2/23/2012	4:29:24 PM	Helium MFC set to  0.000000
2/23/2012	4:29:24 PM	H2 MFC set to  0.000000
2/23/2012	4:29:24 PM	BCl3 MFC set to  0.000000
2/23/2012	4:29:24 PM	PH3 MFC set to  0.000000
2/23/2012	4:29:24 PM	SiCl4 MFC set to  0.000000
2/23/2012	4:29:24 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	4:29:24 PM	Tube furnace set to 0
2/23/2012	4:29:25 PM	Run finished at 4:29 PM
2/23/2012	4:29:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/23/2012	4:35:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/23/2012	4:35:45 PM	Recipe started at 4:35 PM
2/23/2012	4:35:45 PM	Helium valve closed
2/23/2012	4:35:45 PM	H2 valve closed
2/23/2012	4:35:45 PM	BCl3 valve closed
2/23/2012	4:35:45 PM	PH3 valve closed
2/23/2012	4:35:45 PM	SiCl4 pre valve closed
2/23/2012	4:35:45 PM	SiCl4 post valve closed
2/23/2012	4:35:45 PM	Main Vac valve closed
2/23/2012	4:35:45 PM	Bubbler valve closed
2/23/2012	4:35:45 PM	Bypass valve opened
2/23/2012	4:35:45 PM	Helium MFC set to  0.000000
2/23/2012	4:35:45 PM	H2 MFC set to  0.000000
2/23/2012	4:35:45 PM	BCl3 MFC set to  0.000000
2/23/2012	4:35:45 PM	PH3 MFC set to  0.000000
2/23/2012	4:35:45 PM	SiCl4 MFC set to  0.000000
2/23/2012	4:35:45 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	4:35:45 PM	Tube furnace set to 0
2/23/2012	4:36:50 PM	Helium valve closed
2/23/2012	4:36:50 PM	H2 valve closed
2/23/2012	4:36:50 PM	BCl3 valve closed
2/23/2012	4:36:50 PM	PH3 valve closed
2/23/2012	4:36:50 PM	SiCl4 pre valve closed
2/23/2012	4:36:50 PM	SiCl4 post valve closed
2/23/2012	4:36:50 PM	Main Vac valve closed
2/23/2012	4:36:50 PM	Bubbler valve closed
2/23/2012	4:36:50 PM	Bypass valve opened
2/23/2012	4:36:50 PM	Helium MFC set to  0.000000
2/23/2012	4:36:50 PM	H2 MFC set to  0.000000
2/23/2012	4:36:50 PM	BCl3 MFC set to  0.000000
2/23/2012	4:36:50 PM	PH3 MFC set to  0.000000
2/23/2012	4:36:50 PM	SiCl4 MFC set to  0.000000
2/23/2012	4:36:50 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	4:36:50 PM	Tube furnace set to 0
2/23/2012	4:37:50 PM	Helium valve closed
2/23/2012	4:37:50 PM	H2 valve closed
2/23/2012	4:37:50 PM	BCl3 valve closed
2/23/2012	4:37:50 PM	PH3 valve closed
2/23/2012	4:37:50 PM	SiCl4 pre valve closed
2/23/2012	4:37:50 PM	SiCl4 post valve closed
2/23/2012	4:37:50 PM	Bypass valve closed
2/23/2012	4:37:50 PM	Bubbler valve closed
2/23/2012	4:37:50 PM	Main Vac valve opened
2/23/2012	4:37:50 PM	Helium MFC set to  0.000000
2/23/2012	4:37:50 PM	H2 MFC set to  0.000000
2/23/2012	4:37:50 PM	BCl3 MFC set to  0.000000
2/23/2012	4:37:50 PM	PH3 MFC set to  0.000000
2/23/2012	4:37:50 PM	SiCl4 MFC set to  0.000000
2/23/2012	4:37:50 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	4:37:50 PM	Tube furnace set to 0
2/23/2012	4:37:51 PM	Run finished at 4:37 PM
2/23/2012	4:37:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/23/2012	5:00:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/23/2012	5:00:18 PM	Recipe started at 5:00 PM
2/23/2012	5:00:18 PM	Helium valve closed
2/23/2012	5:00:18 PM	H2 valve closed
2/23/2012	5:00:18 PM	BCl3 valve closed
2/23/2012	5:00:18 PM	PH3 valve closed
2/23/2012	5:00:18 PM	SiCl4 pre valve closed
2/23/2012	5:00:18 PM	SiCl4 post valve closed
2/23/2012	5:00:18 PM	Main Vac valve closed
2/23/2012	5:00:18 PM	Bubbler valve closed
2/23/2012	5:00:18 PM	Bypass valve opened
2/23/2012	5:00:18 PM	Helium MFC set to  0.000000
2/23/2012	5:00:18 PM	H2 MFC set to  0.000000
2/23/2012	5:00:18 PM	BCl3 MFC set to  0.000000
2/23/2012	5:00:18 PM	PH3 MFC set to  0.000000
2/23/2012	5:00:18 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:00:18 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:00:19 PM	Tube furnace set to 0
2/23/2012	5:00:19 PM	Helium valve closed
2/23/2012	5:00:19 PM	H2 valve closed
2/23/2012	5:00:19 PM	BCl3 valve closed
2/23/2012	5:00:19 PM	PH3 valve closed
2/23/2012	5:00:19 PM	SiCl4 pre valve closed
2/23/2012	5:00:19 PM	SiCl4 post valve closed
2/23/2012	5:00:19 PM	Main Vac valve closed
2/23/2012	5:00:19 PM	Bubbler valve closed
2/23/2012	5:00:19 PM	Bypass valve opened
2/23/2012	5:00:19 PM	Helium MFC set to  0.000000
2/23/2012	5:00:19 PM	H2 MFC set to  0.000000
2/23/2012	5:00:19 PM	BCl3 MFC set to  0.000000
2/23/2012	5:00:19 PM	PH3 MFC set to  0.000000
2/23/2012	5:00:19 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:00:19 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:00:19 PM	Tube furnace set to 0
2/23/2012	5:00:21 PM	Helium valve closed
2/23/2012	5:00:21 PM	H2 valve closed
2/23/2012	5:00:21 PM	BCl3 valve closed
2/23/2012	5:00:21 PM	PH3 valve closed
2/23/2012	5:00:21 PM	SiCl4 pre valve closed
2/23/2012	5:00:21 PM	SiCl4 post valve closed
2/23/2012	5:00:21 PM	Bypass valve closed
2/23/2012	5:00:21 PM	Bubbler valve closed
2/23/2012	5:00:21 PM	Main Vac valve opened
2/23/2012	5:00:21 PM	Helium MFC set to  0.000000
2/23/2012	5:00:21 PM	H2 MFC set to  0.000000
2/23/2012	5:00:21 PM	BCl3 MFC set to  0.000000
2/23/2012	5:00:21 PM	PH3 MFC set to  0.000000
2/23/2012	5:00:21 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:00:21 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:00:21 PM	Tube furnace set to 0
2/23/2012	5:00:23 PM	H2 valve closed
2/23/2012	5:00:23 PM	BCl3 valve closed
2/23/2012	5:00:23 PM	PH3 valve closed
2/23/2012	5:00:23 PM	SiCl4 pre valve closed
2/23/2012	5:00:23 PM	SiCl4 post valve closed
2/23/2012	5:00:23 PM	Bypass valve closed
2/23/2012	5:00:23 PM	Bubbler valve closed
2/23/2012	5:00:23 PM	Helium valve opened
2/23/2012	5:00:23 PM	Main Vac valve opened
2/23/2012	5:00:23 PM	Helium MFC set to  20.000000
2/23/2012	5:00:23 PM	H2 MFC set to  0.000000
2/23/2012	5:00:23 PM	BCl3 MFC set to  0.000000
2/23/2012	5:00:23 PM	PH3 MFC set to  0.000000
2/23/2012	5:00:23 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:00:23 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:00:23 PM	Tube furnace set to 0
2/23/2012	5:00:54 PM	Helium valve closed
2/23/2012	5:00:54 PM	H2 valve closed
2/23/2012	5:00:54 PM	BCl3 valve closed
2/23/2012	5:00:54 PM	PH3 valve closed
2/23/2012	5:00:54 PM	SiCl4 pre valve closed
2/23/2012	5:00:54 PM	SiCl4 post valve closed
2/23/2012	5:00:54 PM	Bypass valve closed
2/23/2012	5:00:54 PM	Bubbler valve closed
2/23/2012	5:00:54 PM	Main Vac valve opened
2/23/2012	5:00:54 PM	Helium MFC set to  0.000000
2/23/2012	5:00:54 PM	H2 MFC set to  0.000000
2/23/2012	5:00:54 PM	BCl3 MFC set to  0.000000
2/23/2012	5:00:54 PM	PH3 MFC set to  0.000000
2/23/2012	5:00:54 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:00:54 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:00:54 PM	Tube furnace set to 0
2/23/2012	5:01:24 PM	H2 valve closed
2/23/2012	5:01:24 PM	BCl3 valve closed
2/23/2012	5:01:24 PM	PH3 valve closed
2/23/2012	5:01:24 PM	SiCl4 pre valve closed
2/23/2012	5:01:24 PM	SiCl4 post valve closed
2/23/2012	5:01:24 PM	Bypass valve closed
2/23/2012	5:01:24 PM	Bubbler valve closed
2/23/2012	5:01:24 PM	Helium valve opened
2/23/2012	5:01:24 PM	Main Vac valve opened
2/23/2012	5:01:24 PM	Helium MFC set to  20.000000
2/23/2012	5:01:24 PM	H2 MFC set to  0.000000
2/23/2012	5:01:24 PM	BCl3 MFC set to  0.000000
2/23/2012	5:01:24 PM	PH3 MFC set to  0.000000
2/23/2012	5:01:24 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:01:24 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:01:24 PM	Tube furnace set to 0
2/23/2012	5:01:54 PM	Helium valve closed
2/23/2012	5:01:54 PM	H2 valve closed
2/23/2012	5:01:54 PM	BCl3 valve closed
2/23/2012	5:01:54 PM	PH3 valve closed
2/23/2012	5:01:54 PM	SiCl4 pre valve closed
2/23/2012	5:01:54 PM	SiCl4 post valve closed
2/23/2012	5:01:54 PM	Bypass valve closed
2/23/2012	5:01:54 PM	Bubbler valve closed
2/23/2012	5:01:54 PM	Main Vac valve opened
2/23/2012	5:01:54 PM	Helium MFC set to  0.000000
2/23/2012	5:01:54 PM	H2 MFC set to  0.000000
2/23/2012	5:01:54 PM	BCl3 MFC set to  0.000000
2/23/2012	5:01:54 PM	PH3 MFC set to  0.000000
2/23/2012	5:01:54 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:01:54 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:01:54 PM	Tube furnace set to 0
2/23/2012	5:02:24 PM	H2 valve closed
2/23/2012	5:02:24 PM	BCl3 valve closed
2/23/2012	5:02:24 PM	PH3 valve closed
2/23/2012	5:02:24 PM	SiCl4 pre valve closed
2/23/2012	5:02:24 PM	SiCl4 post valve closed
2/23/2012	5:02:24 PM	Bypass valve closed
2/23/2012	5:02:24 PM	Bubbler valve closed
2/23/2012	5:02:24 PM	Helium valve opened
2/23/2012	5:02:24 PM	Main Vac valve opened
2/23/2012	5:02:24 PM	Helium MFC set to  20.000000
2/23/2012	5:02:24 PM	H2 MFC set to  0.000000
2/23/2012	5:02:24 PM	BCl3 MFC set to  0.000000
2/23/2012	5:02:24 PM	PH3 MFC set to  0.000000
2/23/2012	5:02:24 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:02:24 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:02:24 PM	Tube furnace set to 0
2/23/2012	5:02:54 PM	Helium valve closed
2/23/2012	5:02:54 PM	H2 valve closed
2/23/2012	5:02:54 PM	BCl3 valve closed
2/23/2012	5:02:54 PM	PH3 valve closed
2/23/2012	5:02:54 PM	SiCl4 pre valve closed
2/23/2012	5:02:54 PM	SiCl4 post valve closed
2/23/2012	5:02:54 PM	Bypass valve closed
2/23/2012	5:02:54 PM	Bubbler valve closed
2/23/2012	5:02:54 PM	Main Vac valve opened
2/23/2012	5:02:54 PM	Helium MFC set to  0.000000
2/23/2012	5:02:54 PM	H2 MFC set to  0.000000
2/23/2012	5:02:54 PM	BCl3 MFC set to  0.000000
2/23/2012	5:02:54 PM	PH3 MFC set to  0.000000
2/23/2012	5:02:54 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:02:54 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:02:54 PM	Tube furnace set to 0
2/23/2012	5:03:25 PM	H2 valve closed
2/23/2012	5:03:25 PM	BCl3 valve closed
2/23/2012	5:03:25 PM	PH3 valve closed
2/23/2012	5:03:25 PM	SiCl4 pre valve closed
2/23/2012	5:03:25 PM	SiCl4 post valve closed
2/23/2012	5:03:25 PM	Bypass valve closed
2/23/2012	5:03:25 PM	Bubbler valve closed
2/23/2012	5:03:25 PM	Helium valve opened
2/23/2012	5:03:25 PM	Main Vac valve opened
2/23/2012	5:03:25 PM	Helium MFC set to  20.000000
2/23/2012	5:03:25 PM	H2 MFC set to  0.000000
2/23/2012	5:03:25 PM	BCl3 MFC set to  0.000000
2/23/2012	5:03:25 PM	PH3 MFC set to  0.000000
2/23/2012	5:03:25 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:03:25 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:03:25 PM	Tube furnace set to 0
2/23/2012	5:03:55 PM	Helium valve closed
2/23/2012	5:03:55 PM	H2 valve closed
2/23/2012	5:03:55 PM	BCl3 valve closed
2/23/2012	5:03:55 PM	PH3 valve closed
2/23/2012	5:03:55 PM	SiCl4 pre valve closed
2/23/2012	5:03:55 PM	SiCl4 post valve closed
2/23/2012	5:03:55 PM	Bypass valve closed
2/23/2012	5:03:55 PM	Bubbler valve closed
2/23/2012	5:03:55 PM	Main Vac valve opened
2/23/2012	5:03:55 PM	Helium MFC set to  0.000000
2/23/2012	5:03:55 PM	H2 MFC set to  0.000000
2/23/2012	5:03:55 PM	BCl3 MFC set to  0.000000
2/23/2012	5:03:55 PM	PH3 MFC set to  0.000000
2/23/2012	5:03:55 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:03:55 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:03:55 PM	Tube furnace set to 0
2/23/2012	5:04:25 PM	H2 valve closed
2/23/2012	5:04:25 PM	BCl3 valve closed
2/23/2012	5:04:25 PM	PH3 valve closed
2/23/2012	5:04:25 PM	SiCl4 pre valve closed
2/23/2012	5:04:25 PM	SiCl4 post valve closed
2/23/2012	5:04:25 PM	Bypass valve closed
2/23/2012	5:04:25 PM	Bubbler valve closed
2/23/2012	5:04:25 PM	Helium valve opened
2/23/2012	5:04:25 PM	Main Vac valve opened
2/23/2012	5:04:25 PM	Helium MFC set to  20.000000
2/23/2012	5:04:25 PM	H2 MFC set to  0.000000
2/23/2012	5:04:25 PM	BCl3 MFC set to  0.000000
2/23/2012	5:04:25 PM	PH3 MFC set to  0.000000
2/23/2012	5:04:25 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:04:25 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:04:25 PM	Tube furnace set to 0
2/23/2012	5:04:55 PM	Helium valve closed
2/23/2012	5:04:55 PM	H2 valve closed
2/23/2012	5:04:55 PM	BCl3 valve closed
2/23/2012	5:04:55 PM	PH3 valve closed
2/23/2012	5:04:55 PM	SiCl4 pre valve closed
2/23/2012	5:04:55 PM	SiCl4 post valve closed
2/23/2012	5:04:55 PM	Bypass valve closed
2/23/2012	5:04:55 PM	Bubbler valve closed
2/23/2012	5:04:55 PM	Main Vac valve opened
2/23/2012	5:04:55 PM	Helium MFC set to  0.000000
2/23/2012	5:04:55 PM	H2 MFC set to  0.000000
2/23/2012	5:04:55 PM	BCl3 MFC set to  0.000000
2/23/2012	5:04:55 PM	PH3 MFC set to  0.000000
2/23/2012	5:04:55 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:04:55 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:04:55 PM	Tube furnace set to 0
2/23/2012	5:05:25 PM	H2 valve closed
2/23/2012	5:05:25 PM	BCl3 valve closed
2/23/2012	5:05:25 PM	PH3 valve closed
2/23/2012	5:05:25 PM	SiCl4 pre valve closed
2/23/2012	5:05:25 PM	SiCl4 post valve closed
2/23/2012	5:05:25 PM	Bypass valve closed
2/23/2012	5:05:25 PM	Bubbler valve closed
2/23/2012	5:05:25 PM	Helium valve opened
2/23/2012	5:05:25 PM	Main Vac valve opened
2/23/2012	5:05:25 PM	Helium MFC set to  20.000000
2/23/2012	5:05:25 PM	H2 MFC set to  0.000000
2/23/2012	5:05:25 PM	BCl3 MFC set to  0.000000
2/23/2012	5:05:25 PM	PH3 MFC set to  0.000000
2/23/2012	5:05:25 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:05:25 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:05:26 PM	Tube furnace set to 0
2/23/2012	5:05:56 PM	Helium valve closed
2/23/2012	5:05:56 PM	H2 valve closed
2/23/2012	5:05:56 PM	BCl3 valve closed
2/23/2012	5:05:56 PM	PH3 valve closed
2/23/2012	5:05:56 PM	SiCl4 pre valve closed
2/23/2012	5:05:56 PM	SiCl4 post valve closed
2/23/2012	5:05:56 PM	Bypass valve closed
2/23/2012	5:05:56 PM	Bubbler valve closed
2/23/2012	5:05:56 PM	Main Vac valve opened
2/23/2012	5:05:56 PM	Helium MFC set to  0.000000
2/23/2012	5:05:56 PM	H2 MFC set to  0.000000
2/23/2012	5:05:56 PM	BCl3 MFC set to  0.000000
2/23/2012	5:05:56 PM	PH3 MFC set to  0.000000
2/23/2012	5:05:56 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:05:56 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:05:56 PM	Tube furnace set to 0
2/23/2012	5:06:26 PM	H2 valve closed
2/23/2012	5:06:26 PM	BCl3 valve closed
2/23/2012	5:06:26 PM	PH3 valve closed
2/23/2012	5:06:26 PM	SiCl4 pre valve closed
2/23/2012	5:06:26 PM	SiCl4 post valve closed
2/23/2012	5:06:26 PM	Bypass valve closed
2/23/2012	5:06:26 PM	Bubbler valve closed
2/23/2012	5:06:26 PM	Helium valve opened
2/23/2012	5:06:26 PM	Main Vac valve opened
2/23/2012	5:06:26 PM	Helium MFC set to  20.000000
2/23/2012	5:06:26 PM	H2 MFC set to  0.000000
2/23/2012	5:06:26 PM	BCl3 MFC set to  0.000000
2/23/2012	5:06:26 PM	PH3 MFC set to  0.000000
2/23/2012	5:06:26 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:06:26 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:06:26 PM	Tube furnace set to 0
2/23/2012	5:06:56 PM	Helium valve closed
2/23/2012	5:06:56 PM	H2 valve closed
2/23/2012	5:06:56 PM	BCl3 valve closed
2/23/2012	5:06:56 PM	PH3 valve closed
2/23/2012	5:06:56 PM	SiCl4 pre valve closed
2/23/2012	5:06:56 PM	SiCl4 post valve closed
2/23/2012	5:06:56 PM	Bypass valve closed
2/23/2012	5:06:56 PM	Bubbler valve closed
2/23/2012	5:06:56 PM	Main Vac valve opened
2/23/2012	5:06:56 PM	Helium MFC set to  0.000000
2/23/2012	5:06:56 PM	H2 MFC set to  0.000000
2/23/2012	5:06:56 PM	BCl3 MFC set to  0.000000
2/23/2012	5:06:56 PM	PH3 MFC set to  0.000000
2/23/2012	5:06:56 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:06:56 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:06:56 PM	Tube furnace set to 0
2/23/2012	5:07:26 PM	H2 valve closed
2/23/2012	5:07:26 PM	BCl3 valve closed
2/23/2012	5:07:26 PM	PH3 valve closed
2/23/2012	5:07:26 PM	SiCl4 pre valve closed
2/23/2012	5:07:26 PM	SiCl4 post valve closed
2/23/2012	5:07:26 PM	Bypass valve closed
2/23/2012	5:07:26 PM	Bubbler valve closed
2/23/2012	5:07:26 PM	Helium valve opened
2/23/2012	5:07:26 PM	Main Vac valve opened
2/23/2012	5:07:26 PM	Helium MFC set to  20.000000
2/23/2012	5:07:26 PM	H2 MFC set to  0.000000
2/23/2012	5:07:26 PM	BCl3 MFC set to  0.000000
2/23/2012	5:07:26 PM	PH3 MFC set to  0.000000
2/23/2012	5:07:26 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:07:26 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:07:26 PM	Tube furnace set to 0
2/23/2012	5:07:56 PM	Helium valve closed
2/23/2012	5:07:56 PM	H2 valve closed
2/23/2012	5:07:56 PM	BCl3 valve closed
2/23/2012	5:07:56 PM	PH3 valve closed
2/23/2012	5:07:56 PM	SiCl4 pre valve closed
2/23/2012	5:07:56 PM	SiCl4 post valve closed
2/23/2012	5:07:56 PM	Bypass valve closed
2/23/2012	5:07:56 PM	Bubbler valve closed
2/23/2012	5:07:56 PM	Main Vac valve opened
2/23/2012	5:07:56 PM	Helium MFC set to  0.000000
2/23/2012	5:07:56 PM	H2 MFC set to  0.000000
2/23/2012	5:07:56 PM	BCl3 MFC set to  0.000000
2/23/2012	5:07:56 PM	PH3 MFC set to  0.000000
2/23/2012	5:07:56 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:07:56 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:07:57 PM	Tube furnace set to 0
2/23/2012	5:08:27 PM	H2 valve closed
2/23/2012	5:08:27 PM	BCl3 valve closed
2/23/2012	5:08:27 PM	PH3 valve closed
2/23/2012	5:08:27 PM	SiCl4 pre valve closed
2/23/2012	5:08:27 PM	SiCl4 post valve closed
2/23/2012	5:08:27 PM	Bypass valve closed
2/23/2012	5:08:27 PM	Bubbler valve closed
2/23/2012	5:08:27 PM	Helium valve opened
2/23/2012	5:08:27 PM	Main Vac valve opened
2/23/2012	5:08:27 PM	Helium MFC set to  20.000000
2/23/2012	5:08:27 PM	H2 MFC set to  0.000000
2/23/2012	5:08:27 PM	BCl3 MFC set to  0.000000
2/23/2012	5:08:27 PM	PH3 MFC set to  0.000000
2/23/2012	5:08:27 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:08:27 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:08:27 PM	Tube furnace set to 0
2/23/2012	5:08:57 PM	Helium valve closed
2/23/2012	5:08:57 PM	H2 valve closed
2/23/2012	5:08:57 PM	BCl3 valve closed
2/23/2012	5:08:57 PM	PH3 valve closed
2/23/2012	5:08:57 PM	SiCl4 pre valve closed
2/23/2012	5:08:57 PM	SiCl4 post valve closed
2/23/2012	5:08:57 PM	Bypass valve closed
2/23/2012	5:08:57 PM	Bubbler valve closed
2/23/2012	5:08:57 PM	Main Vac valve opened
2/23/2012	5:08:57 PM	Helium MFC set to  0.000000
2/23/2012	5:08:57 PM	H2 MFC set to  0.000000
2/23/2012	5:08:57 PM	BCl3 MFC set to  0.000000
2/23/2012	5:08:57 PM	PH3 MFC set to  0.000000
2/23/2012	5:08:57 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:08:57 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:08:57 PM	Tube furnace set to 0
2/23/2012	5:09:27 PM	H2 valve closed
2/23/2012	5:09:27 PM	BCl3 valve closed
2/23/2012	5:09:27 PM	PH3 valve closed
2/23/2012	5:09:27 PM	SiCl4 pre valve closed
2/23/2012	5:09:27 PM	SiCl4 post valve closed
2/23/2012	5:09:27 PM	Bypass valve closed
2/23/2012	5:09:27 PM	Bubbler valve closed
2/23/2012	5:09:27 PM	Helium valve opened
2/23/2012	5:09:27 PM	Main Vac valve opened
2/23/2012	5:09:27 PM	Helium MFC set to  20.000000
2/23/2012	5:09:27 PM	H2 MFC set to  0.000000
2/23/2012	5:09:27 PM	BCl3 MFC set to  0.000000
2/23/2012	5:09:27 PM	PH3 MFC set to  0.000000
2/23/2012	5:09:27 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:09:27 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:09:27 PM	Tube furnace set to 0
2/23/2012	5:09:57 PM	Helium valve closed
2/23/2012	5:09:57 PM	H2 valve closed
2/23/2012	5:09:57 PM	BCl3 valve closed
2/23/2012	5:09:57 PM	PH3 valve closed
2/23/2012	5:09:57 PM	SiCl4 pre valve closed
2/23/2012	5:09:57 PM	SiCl4 post valve closed
2/23/2012	5:09:57 PM	Bypass valve closed
2/23/2012	5:09:57 PM	Bubbler valve closed
2/23/2012	5:09:57 PM	Main Vac valve opened
2/23/2012	5:09:57 PM	Helium MFC set to  0.000000
2/23/2012	5:09:57 PM	H2 MFC set to  0.000000
2/23/2012	5:09:57 PM	BCl3 MFC set to  0.000000
2/23/2012	5:09:57 PM	PH3 MFC set to  0.000000
2/23/2012	5:09:57 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:09:57 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:09:57 PM	Tube furnace set to 0
2/23/2012	5:09:58 PM	Run finished at 5:09 PM
2/23/2012	5:09:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/23/2012	5:12:16 PM	Main Vac valve closed
2/23/2012	5:12:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/23/2012	5:12:39 PM	Recipe started at 5:12 PM
2/23/2012	5:12:39 PM	Helium valve closed
2/23/2012	5:12:39 PM	H2 valve closed
2/23/2012	5:12:39 PM	BCl3 valve closed
2/23/2012	5:12:39 PM	PH3 valve closed
2/23/2012	5:12:39 PM	SiCl4 pre valve closed
2/23/2012	5:12:39 PM	SiCl4 post valve closed
2/23/2012	5:12:39 PM	Main Vac valve closed
2/23/2012	5:12:39 PM	Bubbler valve closed
2/23/2012	5:12:39 PM	Bypass valve opened
2/23/2012	5:12:39 PM	Helium MFC set to  0.000000
2/23/2012	5:12:39 PM	H2 MFC set to  0.000000
2/23/2012	5:12:39 PM	BCl3 MFC set to  0.000000
2/23/2012	5:12:39 PM	PH3 MFC set to  0.000000
2/23/2012	5:12:39 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:12:39 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:12:39 PM	Tube furnace set to 0
2/23/2012	5:12:39 PM	Helium valve closed
2/23/2012	5:12:39 PM	H2 valve closed
2/23/2012	5:12:39 PM	BCl3 valve closed
2/23/2012	5:12:39 PM	PH3 valve closed
2/23/2012	5:12:39 PM	SiCl4 pre valve closed
2/23/2012	5:12:39 PM	SiCl4 post valve closed
2/23/2012	5:12:39 PM	Main Vac valve closed
2/23/2012	5:12:39 PM	Bubbler valve closed
2/23/2012	5:12:39 PM	Bypass valve opened
2/23/2012	5:12:39 PM	Helium MFC set to  0.000000
2/23/2012	5:12:39 PM	H2 MFC set to  0.000000
2/23/2012	5:12:39 PM	BCl3 MFC set to  0.000000
2/23/2012	5:12:40 PM	PH3 MFC set to  0.000000
2/23/2012	5:12:40 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:12:40 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:12:40 PM	Tube furnace set to 0
2/23/2012	5:12:42 PM	Helium valve closed
2/23/2012	5:12:42 PM	H2 valve closed
2/23/2012	5:12:42 PM	BCl3 valve closed
2/23/2012	5:12:42 PM	PH3 valve closed
2/23/2012	5:12:42 PM	SiCl4 pre valve closed
2/23/2012	5:12:42 PM	SiCl4 post valve closed
2/23/2012	5:12:42 PM	Bypass valve closed
2/23/2012	5:12:42 PM	Bubbler valve closed
2/23/2012	5:12:42 PM	Main Vac valve opened
2/23/2012	5:12:42 PM	Helium MFC set to  0.000000
2/23/2012	5:12:42 PM	H2 MFC set to  0.000000
2/23/2012	5:12:42 PM	BCl3 MFC set to  0.000000
2/23/2012	5:12:42 PM	PH3 MFC set to  0.000000
2/23/2012	5:12:42 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:12:42 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:12:43 PM	Tube furnace set to 0
2/23/2012	5:12:44 PM	H2 valve closed
2/23/2012	5:12:44 PM	BCl3 valve closed
2/23/2012	5:12:44 PM	PH3 valve closed
2/23/2012	5:12:44 PM	SiCl4 pre valve closed
2/23/2012	5:12:44 PM	SiCl4 post valve closed
2/23/2012	5:12:44 PM	Bypass valve closed
2/23/2012	5:12:44 PM	Bubbler valve closed
2/23/2012	5:12:44 PM	Helium valve opened
2/23/2012	5:12:44 PM	Main Vac valve opened
2/23/2012	5:12:44 PM	Helium MFC set to  20.000000
2/23/2012	5:12:44 PM	H2 MFC set to  0.000000
2/23/2012	5:12:44 PM	BCl3 MFC set to  0.000000
2/23/2012	5:12:44 PM	PH3 MFC set to  0.000000
2/23/2012	5:12:44 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:12:44 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:12:44 PM	Tube furnace set to 0
2/23/2012	5:13:14 PM	Helium valve closed
2/23/2012	5:13:14 PM	H2 valve closed
2/23/2012	5:13:14 PM	BCl3 valve closed
2/23/2012	5:13:14 PM	PH3 valve closed
2/23/2012	5:13:14 PM	SiCl4 pre valve closed
2/23/2012	5:13:14 PM	SiCl4 post valve closed
2/23/2012	5:13:14 PM	Bypass valve closed
2/23/2012	5:13:14 PM	Bubbler valve closed
2/23/2012	5:13:14 PM	Main Vac valve opened
2/23/2012	5:13:14 PM	Helium MFC set to  0.000000
2/23/2012	5:13:14 PM	H2 MFC set to  0.000000
2/23/2012	5:13:14 PM	BCl3 MFC set to  0.000000
2/23/2012	5:13:14 PM	PH3 MFC set to  0.000000
2/23/2012	5:13:14 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:13:14 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:13:14 PM	Tube furnace set to 0
2/23/2012	5:13:44 PM	H2 valve closed
2/23/2012	5:13:44 PM	BCl3 valve closed
2/23/2012	5:13:44 PM	PH3 valve closed
2/23/2012	5:13:44 PM	SiCl4 pre valve closed
2/23/2012	5:13:44 PM	SiCl4 post valve closed
2/23/2012	5:13:44 PM	Bypass valve closed
2/23/2012	5:13:44 PM	Bubbler valve closed
2/23/2012	5:13:44 PM	Helium valve opened
2/23/2012	5:13:44 PM	Main Vac valve opened
2/23/2012	5:13:44 PM	Helium MFC set to  20.000000
2/23/2012	5:13:44 PM	H2 MFC set to  0.000000
2/23/2012	5:13:44 PM	BCl3 MFC set to  0.000000
2/23/2012	5:13:44 PM	PH3 MFC set to  0.000000
2/23/2012	5:13:44 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:13:44 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:13:44 PM	Tube furnace set to 0
2/23/2012	5:14:14 PM	Helium valve closed
2/23/2012	5:14:14 PM	H2 valve closed
2/23/2012	5:14:14 PM	BCl3 valve closed
2/23/2012	5:14:14 PM	PH3 valve closed
2/23/2012	5:14:14 PM	SiCl4 pre valve closed
2/23/2012	5:14:14 PM	SiCl4 post valve closed
2/23/2012	5:14:14 PM	Bypass valve closed
2/23/2012	5:14:14 PM	Bubbler valve closed
2/23/2012	5:14:14 PM	Main Vac valve opened
2/23/2012	5:14:14 PM	Helium MFC set to  0.000000
2/23/2012	5:14:14 PM	H2 MFC set to  0.000000
2/23/2012	5:14:14 PM	BCl3 MFC set to  0.000000
2/23/2012	5:14:14 PM	PH3 MFC set to  0.000000
2/23/2012	5:14:14 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:14:14 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:14:14 PM	Tube furnace set to 0
2/23/2012	5:14:44 PM	H2 valve closed
2/23/2012	5:14:44 PM	BCl3 valve closed
2/23/2012	5:14:44 PM	PH3 valve closed
2/23/2012	5:14:44 PM	SiCl4 pre valve closed
2/23/2012	5:14:44 PM	SiCl4 post valve closed
2/23/2012	5:14:44 PM	Bypass valve closed
2/23/2012	5:14:44 PM	Bubbler valve closed
2/23/2012	5:14:44 PM	Helium valve opened
2/23/2012	5:14:44 PM	Main Vac valve opened
2/23/2012	5:14:44 PM	Helium MFC set to  20.000000
2/23/2012	5:14:44 PM	H2 MFC set to  0.000000
2/23/2012	5:14:44 PM	BCl3 MFC set to  0.000000
2/23/2012	5:14:44 PM	PH3 MFC set to  0.000000
2/23/2012	5:14:44 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:14:44 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:14:45 PM	Tube furnace set to 0
2/23/2012	5:15:15 PM	Helium valve closed
2/23/2012	5:15:15 PM	H2 valve closed
2/23/2012	5:15:15 PM	BCl3 valve closed
2/23/2012	5:15:15 PM	PH3 valve closed
2/23/2012	5:15:15 PM	SiCl4 pre valve closed
2/23/2012	5:15:15 PM	SiCl4 post valve closed
2/23/2012	5:15:15 PM	Bypass valve closed
2/23/2012	5:15:15 PM	Bubbler valve closed
2/23/2012	5:15:15 PM	Main Vac valve opened
2/23/2012	5:15:15 PM	Helium MFC set to  0.000000
2/23/2012	5:15:15 PM	H2 MFC set to  0.000000
2/23/2012	5:15:15 PM	BCl3 MFC set to  0.000000
2/23/2012	5:15:15 PM	PH3 MFC set to  0.000000
2/23/2012	5:15:15 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:15:15 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:15:15 PM	Tube furnace set to 0
2/23/2012	5:15:45 PM	H2 valve closed
2/23/2012	5:15:45 PM	BCl3 valve closed
2/23/2012	5:15:45 PM	PH3 valve closed
2/23/2012	5:15:45 PM	SiCl4 pre valve closed
2/23/2012	5:15:45 PM	SiCl4 post valve closed
2/23/2012	5:15:45 PM	Bypass valve closed
2/23/2012	5:15:45 PM	Bubbler valve closed
2/23/2012	5:15:45 PM	Helium valve opened
2/23/2012	5:15:45 PM	Main Vac valve opened
2/23/2012	5:15:45 PM	Helium MFC set to  20.000000
2/23/2012	5:15:45 PM	H2 MFC set to  0.000000
2/23/2012	5:15:45 PM	BCl3 MFC set to  0.000000
2/23/2012	5:15:45 PM	PH3 MFC set to  0.000000
2/23/2012	5:15:45 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:15:45 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:15:45 PM	Tube furnace set to 0
2/23/2012	5:16:15 PM	Helium valve closed
2/23/2012	5:16:15 PM	H2 valve closed
2/23/2012	5:16:15 PM	BCl3 valve closed
2/23/2012	5:16:15 PM	PH3 valve closed
2/23/2012	5:16:15 PM	SiCl4 pre valve closed
2/23/2012	5:16:15 PM	SiCl4 post valve closed
2/23/2012	5:16:15 PM	Bypass valve closed
2/23/2012	5:16:15 PM	Bubbler valve closed
2/23/2012	5:16:15 PM	Main Vac valve opened
2/23/2012	5:16:15 PM	Helium MFC set to  0.000000
2/23/2012	5:16:15 PM	H2 MFC set to  0.000000
2/23/2012	5:16:15 PM	BCl3 MFC set to  0.000000
2/23/2012	5:16:15 PM	PH3 MFC set to  0.000000
2/23/2012	5:16:15 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:16:15 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:16:15 PM	Tube furnace set to 0
2/23/2012	5:16:45 PM	H2 valve closed
2/23/2012	5:16:45 PM	BCl3 valve closed
2/23/2012	5:16:45 PM	PH3 valve closed
2/23/2012	5:16:45 PM	SiCl4 pre valve closed
2/23/2012	5:16:45 PM	SiCl4 post valve closed
2/23/2012	5:16:45 PM	Bypass valve closed
2/23/2012	5:16:45 PM	Bubbler valve closed
2/23/2012	5:16:45 PM	Helium valve opened
2/23/2012	5:16:45 PM	Main Vac valve opened
2/23/2012	5:16:45 PM	Helium MFC set to  20.000000
2/23/2012	5:16:45 PM	H2 MFC set to  0.000000
2/23/2012	5:16:45 PM	BCl3 MFC set to  0.000000
2/23/2012	5:16:45 PM	PH3 MFC set to  0.000000
2/23/2012	5:16:45 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:16:45 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:16:45 PM	Tube furnace set to 0
2/23/2012	5:17:15 PM	Helium valve closed
2/23/2012	5:17:15 PM	H2 valve closed
2/23/2012	5:17:15 PM	BCl3 valve closed
2/23/2012	5:17:15 PM	PH3 valve closed
2/23/2012	5:17:15 PM	SiCl4 pre valve closed
2/23/2012	5:17:15 PM	SiCl4 post valve closed
2/23/2012	5:17:15 PM	Bypass valve closed
2/23/2012	5:17:15 PM	Bubbler valve closed
2/23/2012	5:17:15 PM	Main Vac valve opened
2/23/2012	5:17:15 PM	Helium MFC set to  0.000000
2/23/2012	5:17:15 PM	H2 MFC set to  0.000000
2/23/2012	5:17:15 PM	BCl3 MFC set to  0.000000
2/23/2012	5:17:16 PM	PH3 MFC set to  0.000000
2/23/2012	5:17:16 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:17:16 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:17:16 PM	Tube furnace set to 0
2/23/2012	5:17:46 PM	H2 valve closed
2/23/2012	5:17:46 PM	BCl3 valve closed
2/23/2012	5:17:46 PM	PH3 valve closed
2/23/2012	5:17:46 PM	SiCl4 pre valve closed
2/23/2012	5:17:46 PM	SiCl4 post valve closed
2/23/2012	5:17:46 PM	Bypass valve closed
2/23/2012	5:17:46 PM	Bubbler valve closed
2/23/2012	5:17:46 PM	Helium valve opened
2/23/2012	5:17:46 PM	Main Vac valve opened
2/23/2012	5:17:46 PM	Helium MFC set to  20.000000
2/23/2012	5:17:46 PM	H2 MFC set to  0.000000
2/23/2012	5:17:46 PM	BCl3 MFC set to  0.000000
2/23/2012	5:17:46 PM	PH3 MFC set to  0.000000
2/23/2012	5:17:46 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:17:46 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:17:46 PM	Tube furnace set to 0
2/23/2012	5:18:16 PM	Helium valve closed
2/23/2012	5:18:16 PM	H2 valve closed
2/23/2012	5:18:16 PM	BCl3 valve closed
2/23/2012	5:18:16 PM	PH3 valve closed
2/23/2012	5:18:16 PM	SiCl4 pre valve closed
2/23/2012	5:18:16 PM	SiCl4 post valve closed
2/23/2012	5:18:16 PM	Bypass valve closed
2/23/2012	5:18:16 PM	Bubbler valve closed
2/23/2012	5:18:16 PM	Main Vac valve opened
2/23/2012	5:18:16 PM	Helium MFC set to  0.000000
2/23/2012	5:18:16 PM	H2 MFC set to  0.000000
2/23/2012	5:18:16 PM	BCl3 MFC set to  0.000000
2/23/2012	5:18:16 PM	PH3 MFC set to  0.000000
2/23/2012	5:18:16 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:18:16 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:18:16 PM	Tube furnace set to 0
2/23/2012	5:18:46 PM	H2 valve closed
2/23/2012	5:18:46 PM	BCl3 valve closed
2/23/2012	5:18:46 PM	PH3 valve closed
2/23/2012	5:18:46 PM	SiCl4 pre valve closed
2/23/2012	5:18:46 PM	SiCl4 post valve closed
2/23/2012	5:18:46 PM	Bypass valve closed
2/23/2012	5:18:46 PM	Bubbler valve closed
2/23/2012	5:18:46 PM	Helium valve opened
2/23/2012	5:18:46 PM	Main Vac valve opened
2/23/2012	5:18:46 PM	Helium MFC set to  20.000000
2/23/2012	5:18:46 PM	H2 MFC set to  0.000000
2/23/2012	5:18:46 PM	BCl3 MFC set to  0.000000
2/23/2012	5:18:46 PM	PH3 MFC set to  0.000000
2/23/2012	5:18:46 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:18:46 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:18:46 PM	Tube furnace set to 0
2/23/2012	5:19:16 PM	Helium valve closed
2/23/2012	5:19:16 PM	H2 valve closed
2/23/2012	5:19:16 PM	BCl3 valve closed
2/23/2012	5:19:16 PM	PH3 valve closed
2/23/2012	5:19:16 PM	SiCl4 pre valve closed
2/23/2012	5:19:16 PM	SiCl4 post valve closed
2/23/2012	5:19:16 PM	Bypass valve closed
2/23/2012	5:19:16 PM	Bubbler valve closed
2/23/2012	5:19:16 PM	Main Vac valve opened
2/23/2012	5:19:16 PM	Helium MFC set to  0.000000
2/23/2012	5:19:16 PM	H2 MFC set to  0.000000
2/23/2012	5:19:16 PM	BCl3 MFC set to  0.000000
2/23/2012	5:19:16 PM	PH3 MFC set to  0.000000
2/23/2012	5:19:16 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:19:16 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:19:16 PM	Tube furnace set to 0
2/23/2012	5:19:46 PM	H2 valve closed
2/23/2012	5:19:46 PM	BCl3 valve closed
2/23/2012	5:19:46 PM	PH3 valve closed
2/23/2012	5:19:46 PM	SiCl4 pre valve closed
2/23/2012	5:19:46 PM	SiCl4 post valve closed
2/23/2012	5:19:47 PM	Bypass valve closed
2/23/2012	5:19:47 PM	Bubbler valve closed
2/23/2012	5:19:47 PM	Helium valve opened
2/23/2012	5:19:47 PM	Main Vac valve opened
2/23/2012	5:19:47 PM	Helium MFC set to  20.000000
2/23/2012	5:19:47 PM	H2 MFC set to  0.000000
2/23/2012	5:19:47 PM	BCl3 MFC set to  0.000000
2/23/2012	5:19:47 PM	PH3 MFC set to  0.000000
2/23/2012	5:19:47 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:19:47 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:19:47 PM	Tube furnace set to 0
2/23/2012	5:20:17 PM	Helium valve closed
2/23/2012	5:20:17 PM	H2 valve closed
2/23/2012	5:20:17 PM	BCl3 valve closed
2/23/2012	5:20:17 PM	PH3 valve closed
2/23/2012	5:20:17 PM	SiCl4 pre valve closed
2/23/2012	5:20:17 PM	SiCl4 post valve closed
2/23/2012	5:20:17 PM	Bypass valve closed
2/23/2012	5:20:17 PM	Bubbler valve closed
2/23/2012	5:20:17 PM	Main Vac valve opened
2/23/2012	5:20:17 PM	Helium MFC set to  0.000000
2/23/2012	5:20:17 PM	H2 MFC set to  0.000000
2/23/2012	5:20:17 PM	BCl3 MFC set to  0.000000
2/23/2012	5:20:17 PM	PH3 MFC set to  0.000000
2/23/2012	5:20:17 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:20:17 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:20:17 PM	Tube furnace set to 0
2/23/2012	5:20:47 PM	H2 valve closed
2/23/2012	5:20:47 PM	BCl3 valve closed
2/23/2012	5:20:47 PM	PH3 valve closed
2/23/2012	5:20:47 PM	SiCl4 pre valve closed
2/23/2012	5:20:47 PM	SiCl4 post valve closed
2/23/2012	5:20:47 PM	Bypass valve closed
2/23/2012	5:20:47 PM	Bubbler valve closed
2/23/2012	5:20:47 PM	Helium valve opened
2/23/2012	5:20:47 PM	Main Vac valve opened
2/23/2012	5:20:47 PM	Helium MFC set to  20.000000
2/23/2012	5:20:47 PM	H2 MFC set to  0.000000
2/23/2012	5:20:47 PM	BCl3 MFC set to  0.000000
2/23/2012	5:20:47 PM	PH3 MFC set to  0.000000
2/23/2012	5:20:47 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:20:47 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:20:47 PM	Tube furnace set to 0
2/23/2012	5:21:17 PM	Helium valve closed
2/23/2012	5:21:17 PM	H2 valve closed
2/23/2012	5:21:17 PM	BCl3 valve closed
2/23/2012	5:21:17 PM	PH3 valve closed
2/23/2012	5:21:17 PM	SiCl4 pre valve closed
2/23/2012	5:21:17 PM	SiCl4 post valve closed
2/23/2012	5:21:17 PM	Bypass valve closed
2/23/2012	5:21:17 PM	Bubbler valve closed
2/23/2012	5:21:17 PM	Main Vac valve opened
2/23/2012	5:21:17 PM	Helium MFC set to  0.000000
2/23/2012	5:21:17 PM	H2 MFC set to  0.000000
2/23/2012	5:21:17 PM	BCl3 MFC set to  0.000000
2/23/2012	5:21:17 PM	PH3 MFC set to  0.000000
2/23/2012	5:21:17 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:21:17 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:21:17 PM	Tube furnace set to 0
2/23/2012	5:21:47 PM	H2 valve closed
2/23/2012	5:21:47 PM	BCl3 valve closed
2/23/2012	5:21:47 PM	PH3 valve closed
2/23/2012	5:21:47 PM	SiCl4 pre valve closed
2/23/2012	5:21:47 PM	SiCl4 post valve closed
2/23/2012	5:21:47 PM	Bypass valve closed
2/23/2012	5:21:47 PM	Bubbler valve closed
2/23/2012	5:21:47 PM	Helium valve opened
2/23/2012	5:21:47 PM	Main Vac valve opened
2/23/2012	5:21:47 PM	Helium MFC set to  20.000000
2/23/2012	5:21:47 PM	H2 MFC set to  0.000000
2/23/2012	5:21:47 PM	BCl3 MFC set to  0.000000
2/23/2012	5:21:47 PM	PH3 MFC set to  0.000000
2/23/2012	5:21:47 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:21:47 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:21:47 PM	Tube furnace set to 0
2/23/2012	5:22:18 PM	Helium valve closed
2/23/2012	5:22:18 PM	H2 valve closed
2/23/2012	5:22:18 PM	BCl3 valve closed
2/23/2012	5:22:18 PM	PH3 valve closed
2/23/2012	5:22:18 PM	SiCl4 pre valve closed
2/23/2012	5:22:18 PM	SiCl4 post valve closed
2/23/2012	5:22:18 PM	Bypass valve closed
2/23/2012	5:22:18 PM	Bubbler valve closed
2/23/2012	5:22:18 PM	Main Vac valve opened
2/23/2012	5:22:18 PM	Helium MFC set to  0.000000
2/23/2012	5:22:18 PM	H2 MFC set to  0.000000
2/23/2012	5:22:18 PM	BCl3 MFC set to  0.000000
2/23/2012	5:22:18 PM	PH3 MFC set to  0.000000
2/23/2012	5:22:18 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:22:18 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:22:18 PM	Tube furnace set to 0
2/23/2012	5:22:19 PM	Run finished at 5:22 PM
2/23/2012	5:22:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/23/2012	5:23:11 PM	Main Vac valve closed
2/23/2012	5:23:22 PM	Main Vac valve opened
2/23/2012	5:25:03 PM	Recipe started at 5:25 PM
2/23/2012	5:25:03 PM	Helium valve closed
2/23/2012	5:25:03 PM	H2 valve closed
2/23/2012	5:25:03 PM	BCl3 valve closed
2/23/2012	5:25:03 PM	PH3 valve closed
2/23/2012	5:25:03 PM	SiCl4 pre valve closed
2/23/2012	5:25:03 PM	SiCl4 post valve closed
2/23/2012	5:25:03 PM	Main Vac valve closed
2/23/2012	5:25:03 PM	Bypass valve closed
2/23/2012	5:25:03 PM	Bubbler valve closed
2/23/2012	5:25:03 PM	Helium MFC set to  0.000000
2/23/2012	5:25:03 PM	H2 MFC set to  0.000000
2/23/2012	5:25:03 PM	BCl3 MFC set to  0.000000
2/23/2012	5:25:03 PM	PH3 MFC set to  0.000000
2/23/2012	5:25:03 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:25:03 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:25:03 PM	Tube furnace set to 0
2/23/2012	5:25:06 PM	Helium valve closed
2/23/2012	5:25:06 PM	BCl3 valve closed
2/23/2012	5:25:06 PM	PH3 valve closed
2/23/2012	5:25:06 PM	SiCl4 pre valve closed
2/23/2012	5:25:06 PM	SiCl4 post valve closed
2/23/2012	5:25:06 PM	Main Vac valve closed
2/23/2012	5:25:06 PM	Bypass valve closed
2/23/2012	5:25:06 PM	Bubbler valve closed
2/23/2012	5:25:06 PM	H2 valve opened
2/23/2012	5:25:06 PM	Helium MFC set to  0.000000
2/23/2012	5:25:06 PM	H2 MFC set to  500.000000
2/23/2012	5:25:06 PM	BCl3 MFC set to  0.000000
2/23/2012	5:25:06 PM	PH3 MFC set to  0.000000
2/23/2012	5:25:06 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:25:06 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:25:06 PM	Tube furnace set to 0
2/23/2012	5:26:15 PM	Helium valve closed
2/23/2012	5:26:15 PM	BCl3 valve closed
2/23/2012	5:26:15 PM	PH3 valve closed
2/23/2012	5:26:15 PM	SiCl4 pre valve closed
2/23/2012	5:26:15 PM	SiCl4 post valve closed
2/23/2012	5:26:15 PM	Main Vac valve closed
2/23/2012	5:26:15 PM	Bypass valve closed
2/23/2012	5:26:15 PM	H2 valve opened
2/23/2012	5:26:15 PM	Bubbler valve opened
2/23/2012	5:26:15 PM	Helium MFC set to  0.000000
2/23/2012	5:26:15 PM	H2 MFC set to  500.000000
2/23/2012	5:26:15 PM	BCl3 MFC set to  0.000000
2/23/2012	5:26:15 PM	PH3 MFC set to  0.000000
2/23/2012	5:26:15 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:26:15 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:26:15 PM	Tube furnace set to 0
2/23/2012	5:26:16 PM	Helium valve closed
2/23/2012	5:26:16 PM	BCl3 valve closed
2/23/2012	5:26:16 PM	PH3 valve closed
2/23/2012	5:26:16 PM	SiCl4 pre valve closed
2/23/2012	5:26:16 PM	SiCl4 post valve closed
2/23/2012	5:26:16 PM	Main Vac valve closed
2/23/2012	5:26:16 PM	Bypass valve closed
2/23/2012	5:26:16 PM	H2 valve opened
2/23/2012	5:26:16 PM	Bubbler valve opened
2/23/2012	5:26:16 PM	Helium MFC set to  0.000000
2/23/2012	5:26:16 PM	H2 MFC set to  500.000000
2/23/2012	5:26:16 PM	BCl3 MFC set to  0.000000
2/23/2012	5:26:16 PM	PH3 MFC set to  0.000000
2/23/2012	5:26:16 PM	SiCl4 MFC set to  0.000000
2/23/2012	5:26:16 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:26:16 PM	Tube furnace set to 950
2/23/2012	5:46:16 PM	Helium valve closed
2/23/2012	5:46:16 PM	PH3 valve closed
2/23/2012	5:46:16 PM	Main Vac valve closed
2/23/2012	5:46:16 PM	Bypass valve closed
2/23/2012	5:46:16 PM	H2 valve opened
2/23/2012	5:46:16 PM	BCl3 valve opened
2/23/2012	5:46:16 PM	SiCl4 pre valve opened
2/23/2012	5:46:16 PM	SiCl4 post valve opened
2/23/2012	5:46:16 PM	Bubbler valve opened
2/23/2012	5:46:16 PM	Helium MFC set to  0.000000
2/23/2012	5:46:16 PM	H2 MFC set to  500.000000
2/23/2012	5:46:16 PM	BCl3 MFC set to  1.000000
2/23/2012	5:46:16 PM	PH3 MFC set to  0.000000
2/23/2012	5:46:16 PM	SiCl4 MFC set to  25.000000
2/23/2012	5:46:16 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	5:46:16 PM	Tube furnace set to 950
2/23/2012	6:06:16 PM	Helium valve closed
2/23/2012	6:06:16 PM	BCl3 valve closed
2/23/2012	6:06:16 PM	PH3 valve closed
2/23/2012	6:06:16 PM	SiCl4 pre valve closed
2/23/2012	6:06:16 PM	SiCl4 post valve closed
2/23/2012	6:06:16 PM	Main Vac valve closed
2/23/2012	6:06:16 PM	Bypass valve closed
2/23/2012	6:06:16 PM	H2 valve opened
2/23/2012	6:06:16 PM	Bubbler valve opened
2/23/2012	6:06:16 PM	Helium MFC set to  0.000000
2/23/2012	6:06:16 PM	H2 MFC set to  500.000000
2/23/2012	6:06:16 PM	BCl3 MFC set to  0.000000
2/23/2012	6:06:16 PM	PH3 MFC set to  0.000000
2/23/2012	6:06:16 PM	SiCl4 MFC set to  0.000000
2/23/2012	6:06:16 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	6:06:16 PM	Tube furnace set to 750
2/23/2012	6:11:16 PM	H2 valve closed
2/23/2012	6:11:16 PM	BCl3 valve closed
2/23/2012	6:11:16 PM	PH3 valve closed
2/23/2012	6:11:16 PM	SiCl4 pre valve closed
2/23/2012	6:11:16 PM	SiCl4 post valve closed
2/23/2012	6:11:16 PM	Main Vac valve closed
2/23/2012	6:11:16 PM	Bypass valve closed
2/23/2012	6:11:16 PM	Helium valve opened
2/23/2012	6:11:16 PM	Bubbler valve opened
2/23/2012	6:11:16 PM	Helium MFC set to  500.000000
2/23/2012	6:11:16 PM	H2 MFC set to  0.000000
2/23/2012	6:11:16 PM	BCl3 MFC set to  0.000000
2/23/2012	6:11:16 PM	PH3 MFC set to  0.000000
2/23/2012	6:11:16 PM	SiCl4 MFC set to  0.000000
2/23/2012	6:11:16 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	6:11:17 PM	Tube furnace set to 0
2/23/2012	6:18:51 PM	Run aborted at 6:18 PM
2/23/2012	6:18:51 PM	Helium valve closed
2/23/2012	6:18:51 PM	H2 valve closed
2/23/2012	6:18:51 PM	BCl3 valve closed
2/23/2012	6:18:51 PM	PH3 valve closed
2/23/2012	6:18:51 PM	SiCl4 pre valve closed
2/23/2012	6:18:51 PM	SiCl4 post valve closed
2/23/2012	6:18:51 PM	Bypass valve closed
2/23/2012	6:18:51 PM	Main Vac valve closed
2/23/2012	6:18:51 PM	Bubbler valve closed
2/23/2012	6:18:51 PM	Helium MFC set to  0.000000
2/23/2012	6:18:51 PM	H2 MFC set to  0.000000
2/23/2012	6:18:51 PM	BCl3 MFC set to  0.000000
2/23/2012	6:18:51 PM	PH3 MFC set to  0.000000
2/23/2012	6:18:51 PM	SiCl4 MFC set to  0.000000
2/23/2012	6:18:51 PM	Tube furnace set to 0
2/23/2012	6:18:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/23/2012	6:18:53 PM	Recipe started at 6:18 PM
2/23/2012	6:18:53 PM	Helium valve closed
2/23/2012	6:18:53 PM	H2 valve closed
2/23/2012	6:18:53 PM	BCl3 valve closed
2/23/2012	6:18:53 PM	PH3 valve closed
2/23/2012	6:18:53 PM	SiCl4 pre valve closed
2/23/2012	6:18:53 PM	SiCl4 post valve closed
2/23/2012	6:18:53 PM	Main Vac valve closed
2/23/2012	6:18:53 PM	Bypass valve closed
2/23/2012	6:18:53 PM	Bubbler valve closed
2/23/2012	6:18:53 PM	Helium MFC set to  0.000000
2/23/2012	6:18:53 PM	H2 MFC set to  0.000000
2/23/2012	6:18:53 PM	BCl3 MFC set to  0.000000
2/23/2012	6:18:53 PM	PH3 MFC set to  0.000000
2/23/2012	6:18:53 PM	SiCl4 MFC set to  0.000000
2/23/2012	6:18:53 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	6:18:54 PM	Tube furnace set to 0
2/23/2012	6:18:57 PM	H2 valve closed
2/23/2012	6:18:57 PM	BCl3 valve closed
2/23/2012	6:18:57 PM	PH3 valve closed
2/23/2012	6:18:57 PM	SiCl4 pre valve closed
2/23/2012	6:18:57 PM	SiCl4 post valve closed
2/23/2012	6:18:57 PM	Main Vac valve closed
2/23/2012	6:18:57 PM	Bypass valve closed
2/23/2012	6:18:57 PM	Bubbler valve closed
2/23/2012	6:18:57 PM	Helium valve opened
2/23/2012	6:18:57 PM	Helium MFC set to  500.000000
2/23/2012	6:18:57 PM	H2 MFC set to  0.000000
2/23/2012	6:18:57 PM	BCl3 MFC set to  0.000000
2/23/2012	6:18:57 PM	PH3 MFC set to  0.000000
2/23/2012	6:18:57 PM	SiCl4 MFC set to  0.000000
2/23/2012	6:18:57 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	6:18:57 PM	Tube furnace set to 0
2/23/2012	6:18:57 PM	Helium valve closed
2/23/2012	6:18:57 PM	H2 valve closed
2/23/2012	6:18:57 PM	BCl3 valve closed
2/23/2012	6:18:57 PM	PH3 valve closed
2/23/2012	6:18:57 PM	SiCl4 pre valve closed
2/23/2012	6:18:57 PM	SiCl4 post valve closed
2/23/2012	6:18:57 PM	Main Vac valve closed
2/23/2012	6:18:57 PM	Bypass valve closed
2/23/2012	6:18:57 PM	Bubbler valve closed
2/23/2012	6:18:57 PM	Helium MFC set to  0.000000
2/23/2012	6:18:57 PM	H2 MFC set to  0.000000
2/23/2012	6:18:57 PM	BCl3 MFC set to  0.000000
2/23/2012	6:18:57 PM	PH3 MFC set to  0.000000
2/23/2012	6:18:57 PM	SiCl4 MFC set to  0.000000
2/23/2012	6:18:57 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	6:18:57 PM	Tube furnace set to 0
2/23/2012	6:18:58 PM	Run finished at 6:18 PM
2/23/2012	6:18:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/23/2012	6:24:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/23/2012	6:24:26 PM	Recipe started at 6:24 PM
2/23/2012	6:24:26 PM	Helium valve closed
2/23/2012	6:24:26 PM	H2 valve closed
2/23/2012	6:24:27 PM	BCl3 valve closed
2/23/2012	6:24:27 PM	PH3 valve closed
2/23/2012	6:24:27 PM	SiCl4 pre valve closed
2/23/2012	6:24:27 PM	SiCl4 post valve closed
2/23/2012	6:24:27 PM	Main Vac valve closed
2/23/2012	6:24:27 PM	Bubbler valve closed
2/23/2012	6:24:27 PM	Bypass valve opened
2/23/2012	6:24:27 PM	Helium MFC set to  0.000000
2/23/2012	6:24:27 PM	H2 MFC set to  0.000000
2/23/2012	6:24:27 PM	BCl3 MFC set to  0.000000
2/23/2012	6:24:27 PM	PH3 MFC set to  0.000000
2/23/2012	6:24:27 PM	SiCl4 MFC set to  0.000000
2/23/2012	6:24:27 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	6:24:27 PM	Tube furnace set to 0
2/23/2012	6:25:30 PM	Helium valve closed
2/23/2012	6:25:30 PM	H2 valve closed
2/23/2012	6:25:30 PM	BCl3 valve closed
2/23/2012	6:25:30 PM	PH3 valve closed
2/23/2012	6:25:30 PM	SiCl4 pre valve closed
2/23/2012	6:25:30 PM	SiCl4 post valve closed
2/23/2012	6:25:30 PM	Main Vac valve closed
2/23/2012	6:25:30 PM	Bubbler valve closed
2/23/2012	6:25:30 PM	Bypass valve opened
2/23/2012	6:25:30 PM	Helium MFC set to  0.000000
2/23/2012	6:25:30 PM	H2 MFC set to  0.000000
2/23/2012	6:25:30 PM	BCl3 MFC set to  0.000000
2/23/2012	6:25:30 PM	PH3 MFC set to  0.000000
2/23/2012	6:25:30 PM	SiCl4 MFC set to  0.000000
2/23/2012	6:25:30 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	6:25:30 PM	Tube furnace set to 0
2/23/2012	6:26:30 PM	Helium valve closed
2/23/2012	6:26:30 PM	H2 valve closed
2/23/2012	6:26:30 PM	BCl3 valve closed
2/23/2012	6:26:30 PM	PH3 valve closed
2/23/2012	6:26:30 PM	SiCl4 pre valve closed
2/23/2012	6:26:30 PM	SiCl4 post valve closed
2/23/2012	6:26:30 PM	Bypass valve closed
2/23/2012	6:26:30 PM	Bubbler valve closed
2/23/2012	6:26:30 PM	Main Vac valve opened
2/23/2012	6:26:30 PM	Helium MFC set to  0.000000
2/23/2012	6:26:30 PM	H2 MFC set to  0.000000
2/23/2012	6:26:30 PM	BCl3 MFC set to  0.000000
2/23/2012	6:26:30 PM	PH3 MFC set to  0.000000
2/23/2012	6:26:30 PM	SiCl4 MFC set to  0.000000
2/23/2012	6:26:30 PM	Bypass solenoid MFC set to  0.000000
2/23/2012	6:26:30 PM	Tube furnace set to 0
2/23/2012	6:26:31 PM	Run finished at 6:26 PM
2/23/2012	6:26:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
